Low temperature deposition of crystalline chromium phosphide films using dual-source atmospheric pressure chemical vapour deposition

C S Blackman; C J Carmalt; T D Manning; I P Parkin; L Apostolico; K C Molloy

doi:10.1016/j.apsusc.2004.04.010

Low temperature deposition of crystalline chromium phosphide films using dual-source atmospheric pressure chemical vapour deposition

C S Blackman, C J Carmalt, T D Manning, I P Parkin, L Apostolico, K C Molloy

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

12 Citations (SciVal)

Abstract

Thin films of crystalline chromium phosphide (CrP) have been produced from the dual-source atmospheric pressure CVD reaction of chromium hexacarbonyl and cyclohexylphosphine. Analysis of the films using EDAX, SEM, glancing angle XRD and XPS is presented. (C) 2004 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	24-28
Number of pages	5
Journal	Applied Surface Science
Volume	233
Issue number	1-4
DOIs	https://doi.org/10.1016/j.apsusc.2004.04.010
Publication status	Published - 2004

Bibliographical note

ID number: ISI:000222497700005

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10.1016/j.apsusc.2004.04.010

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title = "Low temperature deposition of crystalline chromium phosphide films using dual-source atmospheric pressure chemical vapour deposition",

abstract = "Thin films of crystalline chromium phosphide (CrP) have been produced from the dual-source atmospheric pressure CVD reaction of chromium hexacarbonyl and cyclohexylphosphine. Analysis of the films using EDAX, SEM, glancing angle XRD and XPS is presented. (C) 2004 Elsevier B.V. All rights reserved.",

author = "Blackman, {C S} and Carmalt, {C J} and Manning, {T D} and Parkin, {I P} and L Apostolico and Molloy, {K C}",

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year = "2004",

doi = "10.1016/j.apsusc.2004.04.010",

language = "English",

volume = "233",

pages = "24--28",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier B.V.",

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T1 - Low temperature deposition of crystalline chromium phosphide films using dual-source atmospheric pressure chemical vapour deposition

AU - Blackman, C S

AU - Carmalt, C J

AU - Manning, T D

AU - Parkin, I P

AU - Apostolico, L

AU - Molloy, K C

N1 - ID number: ISI:000222497700005

PY - 2004

Y1 - 2004

N2 - Thin films of crystalline chromium phosphide (CrP) have been produced from the dual-source atmospheric pressure CVD reaction of chromium hexacarbonyl and cyclohexylphosphine. Analysis of the films using EDAX, SEM, glancing angle XRD and XPS is presented. (C) 2004 Elsevier B.V. All rights reserved.

AB - Thin films of crystalline chromium phosphide (CrP) have been produced from the dual-source atmospheric pressure CVD reaction of chromium hexacarbonyl and cyclohexylphosphine. Analysis of the films using EDAX, SEM, glancing angle XRD and XPS is presented. (C) 2004 Elsevier B.V. All rights reserved.

U2 - 10.1016/j.apsusc.2004.04.010

DO - 10.1016/j.apsusc.2004.04.010

M3 - Article

SN - 0169-4332

VL - 233

SP - 24

EP - 28

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-4

ER -

Low temperature deposition of crystalline chromium phosphide films using dual-source atmospheric pressure chemical vapour deposition

Abstract

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