Abstract
The design of a micromachined rotating gyroscope is described, incorporating an electromagnetically levitated aluminium rotor. The coil design for levitation produces good lateral stability. A 400nm diameter, 12μm thick rotor is levitated to a height of 30 μm.
| Original language | English |
|---|---|
| Pages (from-to) | 1845-1846 |
| Number of pages | 2 |
| Journal | Electronics Letters |
| Volume | 31 |
| Issue number | 21 |
| DOIs | |
| Publication status | Published - 12 Oct 1995 |
Keywords
- Gyroscopes
- Magnetic levitation
- Micromotors
ASJC Scopus subject areas
- Electrical and Electronic Engineering
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