Abstract
The design of a micromachined rotating gyroscope is described, incorporating an electromagnetically levitated aluminium rotor. The coil design for levitation produces good lateral stability. A 400nm diameter, 12μm thick rotor is levitated to a height of 30 μm.
Original language | English |
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Pages (from-to) | 1845-1846 |
Number of pages | 2 |
Journal | Electronics Letters |
Volume | 31 |
Issue number | 21 |
DOIs | |
Publication status | Published - 12 Oct 1995 |
Keywords
- Gyroscopes
- Magnetic levitation
- Micromotors
ASJC Scopus subject areas
- Electrical and Electronic Engineering