Large area diffraction-based inspection of submicron periodic structures

M Drzik; A Satka; D Hasko; J Kovac; F Uherek; Duncan W P Allsopp; S J Abbott; G Hubbard

doi:10.1016/j.mee.2008.12.041

Large area diffraction-based inspection of submicron periodic structures

M Drzik, A Satka, D Hasko, J Kovac, F Uherek, Duncan W P Allsopp, S J Abbott, G Hubbard

Department of Electronic & Electrical Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (SciVal)

Abstract

An experimental study of diagnostics possibilities of periodic structures using visible light diffraction principles is presented. The goal of the study is to develop a simple method suitable for use in the inspection of large scale area periodically structured surfaces. It is shown that diffraction-based methods can be applied for surface feature size determination in the submicron region as well as for assessment of the surface profile modulation depth. In order to observe the periodic structure defects on the whole surface of 6-8 inch wafers, an optical filtration set-up is proposed using a white light illumination source. Diffraction efficiency has been acquired by photoelectric sensing of laser beam diffraction. Determined values, - of both the surface feature size and the depth of modulation coincide well with that obtained by AFM and SEM.

Original language	English
Pages (from-to)	1025-1028
Number of pages	4
Journal	Microelectronic Engineering
Volume	86
Issue number	4-6
DOIs	https://doi.org/10.1016/j.mee.2008.12.041
Publication status	Published - Apr 2008
Event	34th International Conference on Micro- and Nano-Engineering - Athens, Greece Duration: 1 Apr 2008 → …

Bibliographical note

Proceedings paper from the 34th International Conference on Micro- and Nano-Engineering. Athens, Greece, 15-18 September 2008

Keywords

Moth eye
Porous alumina
Diffraction efficiency
Optical diagnostics
Light diffraction
Phase gratings
Periodic structures

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10.1016/j.mee.2008.12.041

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title = "Large area diffraction-based inspection of submicron periodic structures",

abstract = "An experimental study of diagnostics possibilities of periodic structures using visible light diffraction principles is presented. The goal of the study is to develop a simple method suitable for use in the inspection of large scale area periodically structured surfaces. It is shown that diffraction-based methods can be applied for surface feature size determination in the submicron region as well as for assessment of the surface profile modulation depth. In order to observe the periodic structure defects on the whole surface of 6-8 inch wafers, an optical filtration set-up is proposed using a white light illumination source. Diffraction efficiency has been acquired by photoelectric sensing of laser beam diffraction. Determined values, - of both the surface feature size and the depth of modulation coincide well with that obtained by AFM and SEM.",

keywords = "Moth eye, Porous alumina, Diffraction efficiency, Optical diagnostics, Light diffraction, Phase gratings, Periodic structures",

author = "M Drzik and A Satka and D Hasko and J Kovac and F Uherek and Allsopp, {Duncan W P} and Abbott, {S J} and G Hubbard",

note = "Proceedings paper from the 34th International Conference on Micro- and Nano-Engineering. Athens, Greece, 15-18 September 2008; 34th International Conference on Micro- and Nano-Engineering ; Conference date: 01-04-2008",

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AU - Drzik, M

AU - Satka, A

AU - Hasko, D

AU - Kovac, J

AU - Uherek, F

AU - Allsopp, Duncan W P

AU - Abbott, S J

AU - Hubbard, G

N1 - Proceedings paper from the 34th International Conference on Micro- and Nano-Engineering. Athens, Greece, 15-18 September 2008

PY - 2008/4

Y1 - 2008/4

N2 - An experimental study of diagnostics possibilities of periodic structures using visible light diffraction principles is presented. The goal of the study is to develop a simple method suitable for use in the inspection of large scale area periodically structured surfaces. It is shown that diffraction-based methods can be applied for surface feature size determination in the submicron region as well as for assessment of the surface profile modulation depth. In order to observe the periodic structure defects on the whole surface of 6-8 inch wafers, an optical filtration set-up is proposed using a white light illumination source. Diffraction efficiency has been acquired by photoelectric sensing of laser beam diffraction. Determined values, - of both the surface feature size and the depth of modulation coincide well with that obtained by AFM and SEM.

AB - An experimental study of diagnostics possibilities of periodic structures using visible light diffraction principles is presented. The goal of the study is to develop a simple method suitable for use in the inspection of large scale area periodically structured surfaces. It is shown that diffraction-based methods can be applied for surface feature size determination in the submicron region as well as for assessment of the surface profile modulation depth. In order to observe the periodic structure defects on the whole surface of 6-8 inch wafers, an optical filtration set-up is proposed using a white light illumination source. Diffraction efficiency has been acquired by photoelectric sensing of laser beam diffraction. Determined values, - of both the surface feature size and the depth of modulation coincide well with that obtained by AFM and SEM.

KW - Moth eye

KW - Porous alumina

KW - Diffraction efficiency

KW - Optical diagnostics

KW - Light diffraction

KW - Phase gratings

KW - Periodic structures

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DO - 10.1016/j.mee.2008.12.041

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JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 4-6

T2 - 34th International Conference on Micro- and Nano-Engineering

Y2 - 1 April 2008

ER -

Large area diffraction-based inspection of submicron periodic structures

Abstract

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Keywords

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