Integration of Individual Nanoscale Structures into Devices Using Dynamic Nanostenciling

S Egger, Adelina Ilie, S Machida, T Nakayama

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

We succeeded in integrating individual, pre-existing nanostructures into functional devices using ultrahigh vacuum dynamic nanostenciling. Nanostructures are first located via atomic force microscopy (AFM), while device elements are added step by step, with an achieved positional accuracy of 20 nm. Electronic transport, potentiometry, and scanning Kelvin probe can be used for control at any fabrication stage.
Original languageEnglish
Title of host publication2nd IEEE International Nanoelectronics Conference, 2008. INEC 2008
PublisherIEE
Pages158 - 159
Number of pages2
ISBN (Print)9781424415724
DOIs
Publication statusPublished - 2008
Event2nd IEEE International Nanoelectronics Conference, 2008 - Shanghai, China
Duration: 24 Mar 200827 Mar 2008

Conference

Conference2nd IEEE International Nanoelectronics Conference, 2008
Abbreviated titleINEC 2008
CountryChina
CityShanghai
Period24/03/0827/03/08

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