The organozinc fluorocarboxylates RZnO2CRf and RZnO2CRf·TMEDA, along with Zn(O2CRf)2·TMEDA (R = Me, Et; Rf = C2F5, C3F7) have been synthesized. The structures of EtZnO2C2F5 (5), EtZnO2C3F7 (7), EtZnO2C2F5·TMEDA (11), Zn(O2C2F5)2·TMEDA (13), along with products from the adventitious reaction with either O2 or H2O, Zn10Me4(OMe)4(O2CC2F5)12 (2), Zn9Et2(O2CC2F5)12(O)2 (6), Zn8Et4(OEt)4(O2CC3F7)6(O) (8), [Zn(O2CC3F7)2·TMEDA]2·H2O (15) have been determined. Thin films of oriented ZnO have been deposited on glass substrates by low-pressure chemical vapor deposition (LPCVD) using 3 and 10 as precursors, though no fluorine incorporation in the films was noted. LPCVD using 13 as precursor also yielded fluorine-free ZnO, but lacking the oriented growth observed using 3, 10. However, 5, which exhibits short intermolecular Zn···F contacts in the solid state, thermally decomposes to bulk ZnF2.