Initial fabrication of a micro-induction gyroscope

C. B. Williams; C. Shearwood; P. H. Mellor; A. D. Mattingley; M. R.J. Gibbs; R. B. Yates

doi:10.1016/0167-9317(95)00302-9

Initial fabrication of a micro-induction gyroscope

C. B. Williams, C. Shearwood, P. H. Mellor, A. D. Mattingley, M. R.J. Gibbs, R. B. Yates

Department of Physics

University of Sheffield

Research output: Contribution to journal › Article › peer-review

35 Citations (SciVal)

Abstract

A planar coil design capable of levitating an aluminium rotor by electromagnetic induction is described. The coil is fabricated from Au onto a Si(001) substrate with a footprint size of 700 μm, and coil thickness and typical width of 1.3 μm and 50 μm respectively. The rotors are made from Al with a thickness of 12 μm and diameter of 400 μm. A maximum levitation height of 10 μm is measured with a coil excitation current of 800 mA_pk. This height is increased to 25 μm by the incorporation of a high permeability amorphous magnetic backing plane below the planar coils. Excellent quantitative agreement is observed between the predictions of modelling and experimental measurements of levitation height versus coil excitation current. The application of this levitated rotor to a wide range of applications, including a micromachined rotating gyroscope is described.

Original language	English
Pages (from-to)	531-534
Number of pages	4
Journal	Microelectronic Engineering
Volume	30
Issue number	1-4
DOIs	https://doi.org/10.1016/0167-9317(95)00302-9
Publication status	Published - Jan 1996

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Access to Document

10.1016/0167-9317(95)00302-9

Cite this

@article{7a0b3b2e643a4100bce6b2a9062ab6ad,

title = "Initial fabrication of a micro-induction gyroscope",

abstract = "A planar coil design capable of levitating an aluminium rotor by electromagnetic induction is described. The coil is fabricated from Au onto a Si(001) substrate with a footprint size of 700 μm, and coil thickness and typical width of 1.3 μm and 50 μm respectively. The rotors are made from Al with a thickness of 12 μm and diameter of 400 μm. A maximum levitation height of 10 μm is measured with a coil excitation current of 800 mApk. This height is increased to 25 μm by the incorporation of a high permeability amorphous magnetic backing plane below the planar coils. Excellent quantitative agreement is observed between the predictions of modelling and experimental measurements of levitation height versus coil excitation current. The application of this levitated rotor to a wide range of applications, including a micromachined rotating gyroscope is described.",

author = "Williams, {C. B.} and C. Shearwood and Mellor, {P. H.} and Mattingley, {A. D.} and Gibbs, {M. R.J.} and Yates, {R. B.}",

year = "1996",

month = jan,

doi = "10.1016/0167-9317(95)00302-9",

language = "English",

volume = "30",

pages = "531--534",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "1-4",

}

TY - JOUR

T1 - Initial fabrication of a micro-induction gyroscope

AU - Williams, C. B.

AU - Shearwood, C.

AU - Mellor, P. H.

AU - Mattingley, A. D.

AU - Gibbs, M. R.J.

AU - Yates, R. B.

PY - 1996/1

Y1 - 1996/1

N2 - A planar coil design capable of levitating an aluminium rotor by electromagnetic induction is described. The coil is fabricated from Au onto a Si(001) substrate with a footprint size of 700 μm, and coil thickness and typical width of 1.3 μm and 50 μm respectively. The rotors are made from Al with a thickness of 12 μm and diameter of 400 μm. A maximum levitation height of 10 μm is measured with a coil excitation current of 800 mApk. This height is increased to 25 μm by the incorporation of a high permeability amorphous magnetic backing plane below the planar coils. Excellent quantitative agreement is observed between the predictions of modelling and experimental measurements of levitation height versus coil excitation current. The application of this levitated rotor to a wide range of applications, including a micromachined rotating gyroscope is described.

AB - A planar coil design capable of levitating an aluminium rotor by electromagnetic induction is described. The coil is fabricated from Au onto a Si(001) substrate with a footprint size of 700 μm, and coil thickness and typical width of 1.3 μm and 50 μm respectively. The rotors are made from Al with a thickness of 12 μm and diameter of 400 μm. A maximum levitation height of 10 μm is measured with a coil excitation current of 800 mApk. This height is increased to 25 μm by the incorporation of a high permeability amorphous magnetic backing plane below the planar coils. Excellent quantitative agreement is observed between the predictions of modelling and experimental measurements of levitation height versus coil excitation current. The application of this levitated rotor to a wide range of applications, including a micromachined rotating gyroscope is described.

UR - http://www.scopus.com/inward/record.url?scp=0029779789&partnerID=8YFLogxK

U2 - 10.1016/0167-9317(95)00302-9

DO - 10.1016/0167-9317(95)00302-9

M3 - Article

AN - SCOPUS:0029779789

SN - 0167-9317

VL - 30

SP - 531

EP - 534

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1-4

ER -

Initial fabrication of a micro-induction gyroscope

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this