Influence of the reactor environment on the selective area thermal etching of GaN nanohole arrays

Pierre Marie Coulon, Peng Feng, Benjamin Damilano, Stéphane Vézian, Tao Wang, Philip A. Shields

Research output: Contribution to journal › Article › peer-review

7 Citations (SciVal)

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Dataset for "Influence of MOVPE environment on the selective area thermal etching of GaN nanohole arrays"
Coulon, P.-M. (Creator) & Shields, P. (Project Leader), University of Bath, 16 Mar 2020
DOI: 10.15125/BATH-00726
Dataset