In-Situ grown carbon nanotubes for enhanced CO2 detection in non-dispersive-infra-red system

A De Luca, Z. Racz, M. T. Cole, S. Z. Ali, F. Udrea, J. W. Gardner, W I Milne

Research output: Chapter or section in a book/report/conference proceedingChapter in a published conference proceeding

7 Citations (SciVal)


Non-dispersive-infra-red (NDIR) sensors are believed to be one of the most selective and robust solutions for CO2 detection, though cost prohibits their broader integration. In this paper we propose a commercially viable silicon-on-insulator (SOI) complementary metal-oxide (CMOS) micro-electro-mechanical (MEMS) technology for an IR thermal emitter. For the first time, vertically aligned multi walled carbon nanotubes (VA-MWCNTs) are suggested as a possible coating for the enhancement of the emission intensity of the optical source of a NDIR system. VA-MWCNTs have been grown in situ by chemical vapour deposition (CVD) exclusively on the heater area. Optical microscopy, scanning electron microscopy and Raman spectroscopy have been used to verify the quality of the VA-MWCNTs growth. The CNT-coated emitter demonstrated an increased response to CO2 of approx. 60%. Furthermore, we show that the VA-MWCNTs are stable up to temperatures of 500°C for up to 100 hours.

Original languageEnglish
Title of host publicationIEEE SENSORS 2013 - Proceedings
ISBN (Print)9781467346405
Publication statusPublished - 2013
Event12th IEEE SENSORS 2013 Conference - Baltimore, MD, USA United States
Duration: 4 Nov 20136 Nov 2013


Conference12th IEEE SENSORS 2013 Conference
Country/TerritoryUSA United States
CityBaltimore, MD

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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