Impurity conduction in phosphorus-doped buried-channel silicon-on-insulator field-effect transistors at temperatures between 10 and 295 K

Yukinori Ono, Jean-Francois Morizur, Katsuhiko Nishiguchin, Kei Takashina, Hiroshi Yamaguchi, Kazuma Hiratsuka, Seiji Horiguchi, Hiroshi Inokawa, Yasuo Takahashi

Research output: Contribution to journalArticlepeer-review

14 Citations (SciVal)
Original languageEnglish
Article number235317
JournalPhysical Review B : Condensed Matter and Materials Physics
Volume74
DOIs
Publication statusPublished - 14 Dec 2006

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