Impact of inductively coupled plasma etching conditions on the formation of semi-polar (11 2‾2) and non-polar (11 2‾0) GaN nanorods

Pierre Marie Coulon, Peng Feng, Tao Wang, Philip A. Shields

University of Sheffield

Research output: Contribution to journal › Article › peer-review

3 Citations (SciVal)

1 results
- Title
- Start date(ascending)

Dataset for Impact of Inductively Coupled Plasma Etching Conditions on the Formation of Semi-Polar (11-22) and Non-Polar (11-20) GaN Nanorods
Coulon, P.-M. (Creator), University of Bath, 20 Dec 2020
DOI: 10.15125/BATH-00950
Dataset