Growth and patterning of amorphous FeSiBC films

C. Shearwood, A. D. Mattingley, M. R.J. Gibbs

    Research output: Contribution to journalArticlepeer-review

    17 Citations (SciVal)

    Abstract

    We report the growth of amorphous FeSiBC films on a range of substrates including oriented semiconductor, polycrystalline metal, and polyimide. The films vary in thickness from 2.6 μm down to 20 nm and were characterised by the Magneto-Optic Kerr Effect (MOKE), and for the thicker films a combination of MOKE and a high resolution inductive magnetometer. These measurements imply a skin-depth of 30 nm, at the frequency of the MOKE laser. A representative amorphous FeSiBC film of thickness 0.3 μm was patterned into wires of nominal width 10 μm, separation 5 μm, and length 10 mm by conventional microelectronic fabrication techniques. The switching of the wire-array was investigated by MOKE.

    Original languageEnglish
    Pages (from-to)147-154
    Number of pages8
    JournalJournal of Magnetism and Magnetic Materials
    Volume162
    Issue number2-3
    DOIs
    Publication statusPublished - Sept 1996

    Bibliographical note

    Funding Information:
    Measurements made by Mr R.M. Abraham and S. Dean are acknowledged, together with the X-ray diffraction and electron-probe micro-analysis performed respectively by Mr B. Chapman and Mr H.R. Perrott of Bath University. The financial support of the ESPRC is acknowledged.

    Funding

    Measurements made by Mr R.M. Abraham and S. Dean are acknowledged, together with the X-ray diffraction and electron-probe micro-analysis performed respectively by Mr B. Chapman and Mr H.R. Perrott of Bath University. The financial support of the ESPRC is acknowledged.

    Keywords

    • Amorphous systems - Films
    • FeSiBC
    • Magnetoelastic
    • Microfabrication
    • MOKE
    • Sputtering

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics

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