Abstract
Glass and polymer interstacked superlattice like nanolayers were fabricated by nanosecond-pulsed laser deposition with a 193-nm-ultraviolet laser. The individual layer thickness of this highly transparent thin film could be scaled down to 2 nm, proving a near atomic scale deposition of complex multilayered optical and electronic materials. The layers were selectively doped with Er3\+ and Eu3\+ ions, making it optically active and targeted for integrated sensor application.
Original language | English |
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Article number | 071818 |
Journal | Optical Engineering |
Volume | 53 |
Issue number | 7 |
Early online date | 6 Mar 2014 |
DOIs | |
Publication status | Published - 31 Jul 2014 |
Keywords
- dissimilar materials
- erbium
- europium
- glass
- polymer
- pulsed laser deposition
- rare earth doping
- sensor
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Engineering(all)