Fully differential electro-mechanical phase locked loop sensor circuit

Robert Rudolf, Peter R. Wilson, Li Ke, Reuben Wilcock, Andrew D. Brown, Nick R. Harris

Research output: Contribution to journalArticle

Abstract

Embedding a micro-machined sensing element in a closed loop, force feedback system is a technique commonly used to realise high performance MEMS (micro-electro-mechanical systems) sensors due to the advantages of better linearity, increased dynamic range and reduced parameter sensitivity. Electro-mechanical Sigma Delta modulators (EMSigmaDelta) have been proposedfor this reason and high order loops have been shown to enjoy a good signalto noise ratio (SNR) of more than 100dB. It is also well known that achieving stability in high order EMSigmaDeltas is a challenging task and in practice stabilitycan be lost with large input signals or due to non-ideal effects in the circuits implemented. In this work we propose a novel dfferential frequency domain technique for closed loop control of micro-machined sensors. This method, called the electro-mechanical phase locked loop (EMPLL), uses a differential electro-mechanical phase locked loop to control and measure the detection of micro-machined sensors. We believe that EMPLLs have the potential to have significant advantages over EMSigmaDeltas for high performance MEMS sensors. Preliminary research suggests that this novel approach will lead to significant benefits in Signal to Noise Ratio, Parameter Sensitivity, and Input Signal Range.
Original languageEnglish
Pages (from-to)240-246
Number of pages7
JournalSensors and Actuators A-Physical
Volume194
Issue number1
DOIs
Publication statusPublished - 1 May 2013

Fingerprint

Phase locked loops
Networks (circuits)
sensors
Sensors
Modulators
sensitivity
Signal to noise ratio
embedding
dynamic range
linearity
modulators
Feedback
signal to noise ratios

Cite this

Fully differential electro-mechanical phase locked loop sensor circuit. / Rudolf, Robert; Wilson, Peter R.; Ke, Li; Wilcock, Reuben; Brown, Andrew D.; Harris, Nick R.

In: Sensors and Actuators A-Physical, Vol. 194, No. 1, 01.05.2013, p. 240-246.

Research output: Contribution to journalArticle

Rudolf, Robert ; Wilson, Peter R. ; Ke, Li ; Wilcock, Reuben ; Brown, Andrew D. ; Harris, Nick R. / Fully differential electro-mechanical phase locked loop sensor circuit. In: Sensors and Actuators A-Physical. 2013 ; Vol. 194, No. 1. pp. 240-246.
@article{3901f28a2d024c76afb4bd89abc880b4,
title = "Fully differential electro-mechanical phase locked loop sensor circuit",
abstract = "Embedding a micro-machined sensing element in a closed loop, force feedback system is a technique commonly used to realise high performance MEMS (micro-electro-mechanical systems) sensors due to the advantages of better linearity, increased dynamic range and reduced parameter sensitivity. Electro-mechanical Sigma Delta modulators (EMSigmaDelta) have been proposedfor this reason and high order loops have been shown to enjoy a good signalto noise ratio (SNR) of more than 100dB. It is also well known that achieving stability in high order EMSigmaDeltas is a challenging task and in practice stabilitycan be lost with large input signals or due to non-ideal effects in the circuits implemented. In this work we propose a novel dfferential frequency domain technique for closed loop control of micro-machined sensors. This method, called the electro-mechanical phase locked loop (EMPLL), uses a differential electro-mechanical phase locked loop to control and measure the detection of micro-machined sensors. We believe that EMPLLs have the potential to have significant advantages over EMSigmaDeltas for high performance MEMS sensors. Preliminary research suggests that this novel approach will lead to significant benefits in Signal to Noise Ratio, Parameter Sensitivity, and Input Signal Range.",
author = "Robert Rudolf and Wilson, {Peter R.} and Li Ke and Reuben Wilcock and Brown, {Andrew D.} and Harris, {Nick R.}",
year = "2013",
month = "5",
day = "1",
doi = "10.1016/j.sna.2013.01.053",
language = "English",
volume = "194",
pages = "240--246",
journal = "Sensors and Actuators A-Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "1",

}

TY - JOUR

T1 - Fully differential electro-mechanical phase locked loop sensor circuit

AU - Rudolf, Robert

AU - Wilson, Peter R.

AU - Ke, Li

AU - Wilcock, Reuben

AU - Brown, Andrew D.

AU - Harris, Nick R.

PY - 2013/5/1

Y1 - 2013/5/1

N2 - Embedding a micro-machined sensing element in a closed loop, force feedback system is a technique commonly used to realise high performance MEMS (micro-electro-mechanical systems) sensors due to the advantages of better linearity, increased dynamic range and reduced parameter sensitivity. Electro-mechanical Sigma Delta modulators (EMSigmaDelta) have been proposedfor this reason and high order loops have been shown to enjoy a good signalto noise ratio (SNR) of more than 100dB. It is also well known that achieving stability in high order EMSigmaDeltas is a challenging task and in practice stabilitycan be lost with large input signals or due to non-ideal effects in the circuits implemented. In this work we propose a novel dfferential frequency domain technique for closed loop control of micro-machined sensors. This method, called the electro-mechanical phase locked loop (EMPLL), uses a differential electro-mechanical phase locked loop to control and measure the detection of micro-machined sensors. We believe that EMPLLs have the potential to have significant advantages over EMSigmaDeltas for high performance MEMS sensors. Preliminary research suggests that this novel approach will lead to significant benefits in Signal to Noise Ratio, Parameter Sensitivity, and Input Signal Range.

AB - Embedding a micro-machined sensing element in a closed loop, force feedback system is a technique commonly used to realise high performance MEMS (micro-electro-mechanical systems) sensors due to the advantages of better linearity, increased dynamic range and reduced parameter sensitivity. Electro-mechanical Sigma Delta modulators (EMSigmaDelta) have been proposedfor this reason and high order loops have been shown to enjoy a good signalto noise ratio (SNR) of more than 100dB. It is also well known that achieving stability in high order EMSigmaDeltas is a challenging task and in practice stabilitycan be lost with large input signals or due to non-ideal effects in the circuits implemented. In this work we propose a novel dfferential frequency domain technique for closed loop control of micro-machined sensors. This method, called the electro-mechanical phase locked loop (EMPLL), uses a differential electro-mechanical phase locked loop to control and measure the detection of micro-machined sensors. We believe that EMPLLs have the potential to have significant advantages over EMSigmaDeltas for high performance MEMS sensors. Preliminary research suggests that this novel approach will lead to significant benefits in Signal to Noise Ratio, Parameter Sensitivity, and Input Signal Range.

UR - http://dx.doi.org/10.1016/j.sna.2013.01.053

U2 - 10.1016/j.sna.2013.01.053

DO - 10.1016/j.sna.2013.01.053

M3 - Article

VL - 194

SP - 240

EP - 246

JO - Sensors and Actuators A-Physical

JF - Sensors and Actuators A-Physical

SN - 0924-4247

IS - 1

ER -