Fluorine-vacancy complexes in ultrashallow B-implanted Si

D A Abdulmalik, P G Coleman, N E B Cowern, A J Smith, B J Sealy, W Lerch, S Paul, F Cristiano

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)
Original languageEnglish
JournalApplied Physics Letters
Volume89
Issue number5
Publication statusPublished - 2006

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