Fluorine-vacancy complexes in Si-SiGe-Si structures

D A Abdulmalik, P G Coleman, H A W El Mubarek, P Ashburn

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@article{667f7768d13e49a5830824a4c536a5ac,

title = "Fluorine-vacancy complexes in Si-SiGe-Si structures",

author = "Abdulmalik, {D A} and Coleman, {P G} and {El Mubarek}, {H A W} and P Ashburn",

note = "ID number: ISI:000248018300046",

year = "2007",

language = "English",

volume = "102",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "1",

}