Fluorine in silicon: Diffusion, trapping, and precipitation

X D Pi, C P Burrows, P G Coleman

Research output: Contribution to journal › Article › peer-review

60 Citations (SciVal)

ID number: ISI:000182320200032

Cite this

@article{a0989ebb55424b37b01be9fa0a23ba5b,

title = "Fluorine in silicon: Diffusion, trapping, and precipitation",

author = "Pi, {X D} and Burrows, {C P} and Coleman, {P G}",

note = "ID number: ISI:000182320200032",

year = "2003",

language = "English",

volume = "90",

journal = "Physical Review Letters",

issn = "0031-9007",

publisher = "American Physical Society",

number = "15",

}