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Abstract

Nanogap sensors have a wide range of applications as they can provide accurate direct detection of biomolecules through impedimetric or amperometric signals. Signal response from nanogap sensors is dependent on both the electrode spacing and surface area. However, creating large surface area nanogap sensors presents several challenges during fabrication. We show two different approaches to achieve both horizontal and vertical coplanar nanogap geometries. In the first method we use electron-beam lithography (EBL) to pattern an 11 mm long serpentine nanogap (215 nm) between two electrodes. For the second method we use inductively-coupled plasma (ICP) reactive ion etching (RIE) to create a channel in a silicon substrate, optically pattern a buried 1.0 mm 1.5 mm electrode before anodically bonding a second identical electrode, patterned on glass, directly above. The devices have a wide range of applicability in different sensing techniques with the large area nanogaps presenting advantages over other devices of the same family. As a case study we explore the detection of peptide nucleic acid (PNA)􀀀DNA binding events using dielectric spectroscopy with the horizontal coplanar device.
Original languageEnglish
Article number2128
Number of pages16
JournalSensors
Volume16
Issue number12
DOIs
Publication statusPublished - 14 Dec 2016

Fingerprint

Electrochemical sensors
Electrodes
Fabrication
fabrication
electrodes
sensors
Equipment and Supplies
Sensors
Peptide Nucleic Acids
Dielectric Spectroscopy
Dielectric spectroscopy
Plasma etching
Electron beam lithography
Reactive ion etching
Inductively coupled plasma
Biomolecules
nucleic acids
Silicon
peptides
Glass

Keywords

  • Nanogap junctions
  • anodic bonding
  • capacitance
  • Biosensors

Cite this

Fabrication of a Horizontal and a Vertical Large Surface Area Nanogap Electrochemical Sensor. / Hammond, Jules; Rosamond, Mark C.; Sivaraya, S.; Marken, Frank; Estrela, Pedro.

In: Sensors, Vol. 16, No. 12, 2128, 14.12.2016.

Research output: Contribution to journalArticle

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