Enhanced nitrogen diffusion in 4H-SiC

G J Phelps, N G Wright, E G Chester, C M Johnson, A G O'Neill, S Ortolland, A Horsfall, K Vassilevski, R M Gwilliam, P G Coleman, C P Burrows

Research output: Contribution to journalArticle

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)228-230
Number of pages3
JournalApplied Physics Letters
Volume80
Issue number2
Publication statusPublished - 2002

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