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Electrostatic and magnetoelastic microactuation of Si3N4 bridges

  • C. Shearwood
  • , M. A. Pate
  • , W. Affane
  • , C. R. Whitehouse
  • , J. Woodhead
  • , M. R.J. Gibbs
  • University of Sheffield

Research output: Contribution to conference › Paper › peer-review

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