Electrostatic and magnetoelastic microactuation of Si3N4 bridges

C. Shearwood; M. A. Pate; W. Affane; C. R. Whitehouse; J. Woodhead; M. R.J. Gibbs

Electrostatic and magnetoelastic microactuation of Si₃N₄ bridges

C. Shearwood, M. A. Pate, W. Affane, C. R. Whitehouse, J. Woodhead, M. R.J. Gibbs

Department of Mechanical Engineering

University of Sheffield

Research output: Contribution to conference › Paper › peer-review

Abstract

We describe the fabrication of micron-sized bridges suitable for both electrostatic and magnetoelastic actuation. The principle advantage in the use of magnetoelastic films is the possibility of contactless movement. Static and dynamic modelling is used to evaluate the performance and suitability of a range of bridge types.

Original language	English
Pages	336-339
Number of pages	4
Publication status	Published - 1995
Event	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 25 Jun 1995 → 29 Jun 1995

Conference

Conference	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
City	Stockholm, Sweden
Period	25/06/95 → 29/06/95

ASJC Scopus subject areas

General Engineering

Cite this

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title = "Electrostatic and magnetoelastic microactuation of Si3N4 bridges",

abstract = "We describe the fabrication of micron-sized bridges suitable for both electrostatic and magnetoelastic actuation. The principle advantage in the use of magnetoelastic films is the possibility of contactless movement. Static and dynamic modelling is used to evaluate the performance and suitability of a range of bridge types.",

author = "C. Shearwood and Pate, {M. A.} and W. Affane and Whitehouse, {C. R.} and J. Woodhead and Gibbs, {M. R.J.}",

year = "1995",

language = "English",

pages = "336--339",

note = "Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) ; Conference date: 25-06-1995 Through 29-06-1995",

}

TY - CONF

T1 - Electrostatic and magnetoelastic microactuation of Si3N4 bridges

AU - Shearwood, C.

AU - Pate, M. A.

AU - Affane, W.

AU - Whitehouse, C. R.

AU - Woodhead, J.

AU - Gibbs, M. R.J.

PY - 1995

Y1 - 1995

N2 - We describe the fabrication of micron-sized bridges suitable for both electrostatic and magnetoelastic actuation. The principle advantage in the use of magnetoelastic films is the possibility of contactless movement. Static and dynamic modelling is used to evaluate the performance and suitability of a range of bridge types.

AB - We describe the fabrication of micron-sized bridges suitable for both electrostatic and magnetoelastic actuation. The principle advantage in the use of magnetoelastic films is the possibility of contactless movement. Static and dynamic modelling is used to evaluate the performance and suitability of a range of bridge types.

UR - http://www.scopus.com/inward/record.url?scp=0029543029&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0029543029

SP - 336

EP - 339

T2 - Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)

Y2 - 25 June 1995 through 29 June 1995

ER -

Electrostatic and magnetoelastic microactuation of Si₃N₄ bridges

Abstract

Conference

ASJC Scopus subject areas

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