Electron microscopy of gallium nitride growth on polycrystalline diamond

R. F. Webster, D. Cherns, M. Kuball, Q. Jiang, D. Allsopp

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Transmission and scanning electron microscopy were used to examine the growth of gallium nitride (GaN) on polycrystalline diamond substrates grown by metalorganic vapour phase epitaxy with a low-temperature aluminium nitride (AlN) nucleation layer. Growth on unmasked substrates was in the (0001) orientation with threading dislocation densities ≈7 ×109 cm-2. An epitaxial layer overgrowth technique was used to reduce the dislocation densities further, by depositing silicon nitride stripes on the surface and etching the unmasked regions down to the diamond substrate. A re-growth was then performed on the exposed side walls of the original GaN growth, reducing the threading dislocation density in the overgrown regions by two orders of magnitude. The resulting microstructures and the mechanisms of dislocation reduction are discussed.

Original languageEnglish
Article number114007
JournalSemiconductor Science and Technology
Volume30
Issue number11
DOIs
Publication statusPublished - 15 Oct 2015

Fingerprint

Gallium nitride
Diamond
gallium nitrides
Electron microscopy
Diamonds
electron microscopy
diamonds
Substrates
Metallorganic vapor phase epitaxy
Aluminum nitride
aluminum nitrides
Epitaxial layers
Silicon nitride
silicon nitrides
vapor phase epitaxy
Etching
Nucleation
etching
nucleation
Transmission electron microscopy

Keywords

  • electron microscopy
  • gallium nitride
  • growth
  • polycrystalline diamond

Cite this

Electron microscopy of gallium nitride growth on polycrystalline diamond. / Webster, R. F.; Cherns, D.; Kuball, M.; Jiang, Q.; Allsopp, D.

In: Semiconductor Science and Technology, Vol. 30, No. 11, 114007, 15.10.2015.

Research output: Contribution to journalArticle

Webster, R. F. ; Cherns, D. ; Kuball, M. ; Jiang, Q. ; Allsopp, D. / Electron microscopy of gallium nitride growth on polycrystalline diamond. In: Semiconductor Science and Technology. 2015 ; Vol. 30, No. 11.
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