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Abstract
We examine the electron mobility and hole mobility at the Si/buried oxide (BOX) interface at which the valley splitting of the electron system is strongly enhanced, and compare the values observed to those at a standard Si/thermal oxide (T-SiO2) interface in the same silicon-on-insulator device. In contrast to the electron mobility, which is lower at the Si/BOX interface, the hole mobility at the Si/BOX interface is found to be slightly higher than that at the Si/T-SiO2 interface.
| Original language | English |
|---|---|
| Article number | 191603 |
| Journal | Applied Physics Letters |
| Volume | 102 |
| Issue number | 19 |
| Early online date | 15 May 2013 |
| DOIs | |
| Publication status | Published - May 2013 |
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