Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications

Stephan Kloss, Rhodri W C Lewis, Andrew Dent, Nick Weston, Kevyn Jonas, Christopher R Bowen, Duncan P Hand, Jonathan D Shephard

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This paper discusses the formation of complex geometry electrode structures on piezoelectric ceramic substrates using nanosecond pulsed laser ablation. Optical microscopy, scanning electron microscopy and surface profiling are used to examine the impact of the laser ablation process onto the substrate material. The influence of laser power, pulse energy and scanning speed on electrode removal and potential substrate damage is discussed. Fabricated prototypes with different electrode designs and potential sensing applications are presented.
Original languageEnglish
Title of host publicationICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings
Place of PublicationOrlando
PublisherLaser Institute of America
Pages1194-1203
Number of pages10
Volume102
ISBN (Print)9780912035598
Publication statusPublished - Nov 2009
Event28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009, November 2, 2009 - November 5, 2009 - Orlando, FL, USA United States
Duration: 1 Nov 2009 → …

Conference

Conference28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009, November 2, 2009 - November 5, 2009
CountryUSA United States
CityOrlando, FL
Period1/11/09 → …

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