Effects of silica sources on nanoporous organosilicate films templated with tetraalkylammonium cations

S Eslava; J. Urrutia; A.N. Busawon; M.R. Baklanov; F. Iacopi; K. Maex; C.E.A. Kirschhock; J.A. Martens

Effects of silica sources on nanoporous organosilicate films templated with tetraalkylammonium cations

S Eslava, J. Urrutia, A.N. Busawon, M.R. Baklanov, F. Iacopi, K. Maex, C.E.A. Kirschhock, J.A. Martens

Department of Chemical Engineering

Research output: Chapter or section in a book/report/conference proceeding › Book chapter

Abstract

Nanoporous organosilicate films have been recently prepared using tetraalkylammonium cations in acid and basic media, outperforming other materials. Resulting films using basic medium were called zeolite-inspired low-k dielectrics. Here we study the dependence of the properties of these films on the used silica sources: methyltrimethoxy silane (MTMS) and tetraethyl orthosilicate (TEOS). A set of experiments varying the MTMS:TEOS ratio were prepared in acid medium and characterized. A textural, physico-chemical, mechanical, and electrical characterization of this series of experiments is presented.

Original language	English
Title of host publication	Materials Research Society Symposium Proceedings
Pages	53-58
Number of pages	6
Volume	1156
Edition	2009
Publication status	Published - 1 Jan 2009

Cite this

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AU - Eslava, S

AU - Urrutia, J.

AU - Busawon, A.N.

AU - Baklanov, M.R.

AU - Iacopi, F.

AU - Maex, K.

AU - Kirschhock, C.E.A.

AU - Martens, J.A.

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Y1 - 2009/1/1

N2 - Nanoporous organosilicate films have been recently prepared using tetraalkylammonium cations in acid and basic media, outperforming other materials. Resulting films using basic medium were called zeolite-inspired low-k dielectrics. Here we study the dependence of the properties of these films on the used silica sources: methyltrimethoxy silane (MTMS) and tetraethyl orthosilicate (TEOS). A set of experiments varying the MTMS:TEOS ratio were prepared in acid medium and characterized. A textural, physico-chemical, mechanical, and electrical characterization of this series of experiments is presented.

AB - Nanoporous organosilicate films have been recently prepared using tetraalkylammonium cations in acid and basic media, outperforming other materials. Resulting films using basic medium were called zeolite-inspired low-k dielectrics. Here we study the dependence of the properties of these films on the used silica sources: methyltrimethoxy silane (MTMS) and tetraethyl orthosilicate (TEOS). A set of experiments varying the MTMS:TEOS ratio were prepared in acid medium and characterized. A textural, physico-chemical, mechanical, and electrical characterization of this series of experiments is presented.

UR - https://www.scopus.com/pages/publications/77649087425

M3 - Book chapter

AN - SCOPUS:77649087425

SN - 9781605111643

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SP - 53

EP - 58

BT - Materials Research Society Symposium Proceedings

ER -

Effects of silica sources on nanoporous organosilicate films templated with tetraalkylammonium cations

Abstract

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