Effects of silica sources on nanoporous organosilicate films templated with tetraalkylammonium cations

S Eslava, J. Urrutia, A.N. Busawon, M.R. Baklanov, F. Iacopi, K. Maex, C.E.A. Kirschhock, J.A. Martens

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Nanoporous organosilicate films have been recently prepared using tetraalkylammonium cations in acid and basic media, outperforming other materials. Resulting films using basic medium were called zeolite-inspired low-k dielectrics. Here we study the dependence of the properties of these films on the used silica sources: methyltrimethoxy silane (MTMS) and tetraethyl orthosilicate (TEOS). A set of experiments varying the MTMS:TEOS ratio were prepared in acid medium and characterized. A textural, physico-chemical, mechanical, and electrical characterization of this series of experiments is presented.
Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Pages53-58
Number of pages6
Volume1156
Edition2009
Publication statusPublished - 1 Jan 2009

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