Dynamic shadow mask technique: A universal tool for nanoscience

S Egger, A Ilie, Y T Fu, J Chongsathien, D J Kang, M E Welland

Research output: Contribution to journalArticlepeer-review

77 Citations (Scopus)

Abstract

A comprehensive instrument, designed for fabricating nanostructures by evaporation through a dynamic shadow mask in ultrahigh vacuum, is described. The versatility and performance of the instrument is demonstrated through a series of examples, allowing for applications that are impossible to achieve with traditional nanopatterning methods. Clean nanostructures or entire devices made of different materials and on various substrates can be fabricated. The technique is compatible with fundamental surface science and can be easily interfaced with other fabrication and characterization techniques.
Original languageEnglish
Pages (from-to)15-20
Number of pages6
JournalNano Letters
Volume5
Issue number1
DOIs
Publication statusPublished - 2005

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