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Dual-source CVD of Ti(III) Phosphide from TiCl4 and P(SiMe3)3

  • CS Blackman
  • , C J Carmalt
  • , S A O’Neill
  • , I P Parkin
  • , L Apostolico
  • , K C Molloy

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)2
Number of pages1
JournalApplied Surface Science
Volume211
Publication statusPublished - 2003

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