Dual-source CVD of Ti(III) Phosphide from TiCl4 and P(SiMe3)3

CS Blackman, C J Carmalt, S A O’Neill, I P Parkin, L Apostolico, K C Molloy

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)2
Number of pages1
JournalApplied Surface Science
Volume211
Publication statusPublished - 2003

Cite this

Blackman, CS., Carmalt, C. J., O’Neill, S. A., Parkin, I. P., Apostolico, L., & Molloy, K. C. (2003). Dual-source CVD of Ti(III) Phosphide from TiCl4 and P(SiMe3)3. Applied Surface Science, 211, 2.