Dual-source CVD of Ti(III) Phosphide from TiCl4 and P(SiMe3)3

CS Blackman, C J Carmalt, S A O’Neill, I P Parkin, L Apostolico, K C Molloy

Research output: Contribution to journal › Article › peer-review

Cite this

@article{176a81448ff54b30b25c89250a45e9fd,

title = "Dual-source CVD of Ti(III) Phosphide from TiCl4 and P(SiMe3)3",

author = "CS Blackman and Carmalt, {C J} and O{\textquoteright}Neill, {S A} and Parkin, {I P} and L Apostolico and Molloy, {K C}",

year = "2003",

language = "English",

volume = "211",

pages = "2",

journal = "Applied Surface Science",

publisher = "Elsevier B.V.",

}