Dual-source atmospheric pressure CVD of amorphous molybdenum phosphide films on glass using molybdenum(v) chloride and cyclohexylphosphine

C S Blackman, C J Carmalt, T D Manning, S A O'Neill, I P Parkin, L Apostolico, K C Molloy

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Abstract

Molybdenum phosphide films are deposited on glass from MOCl5 and 2P(C6H11)H-2. The atmospheric pressure depositions are carried out at 550 and 600degreesC producing silver brown shiny films. The composition of the film is shown to be MoP1.8 with a resistivity value of ca. 3800 muOmega cm. X-ray analysis of the deposited films indicates that they are amorphous. XPS analysis revealed binding energy shifts of 228.4 eV for Mo3d(5/2) and 128.8 eV for P2p. The deposits passed the scotch test and could not be scratched with steel or brass scalpels. They are also resistant to common solvents but dissolve in concentrated acids.
Original languageEnglish
Pages (from-to)10-+
JournalChemical Vapor Deposition
Volume9
Issue number1
Publication statusPublished - 2003

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    Blackman, C. S., Carmalt, C. J., Manning, T. D., O'Neill, S. A., Parkin, I. P., Apostolico, L., & Molloy, K. C. (2003). Dual-source atmospheric pressure CVD of amorphous molybdenum phosphide films on glass using molybdenum(v) chloride and cyclohexylphosphine. Chemical Vapor Deposition, 9(1), 10-+.