Dual-source atmospheric pressure CVD of amorphous molybdenum phosphide films on glass using molybdenum(v) chloride and cyclohexylphosphine

C S Blackman; C J Carmalt; T D Manning; S A O'Neill; I P Parkin; L Apostolico; K C Molloy

Dual-source atmospheric pressure CVD of amorphous molybdenum phosphide films on glass using molybdenum(v) chloride and cyclohexylphosphine

C S Blackman, C J Carmalt, T D Manning, S A O'Neill, I P Parkin, L Apostolico, K C Molloy

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

Abstract

Molybdenum phosphide films are deposited on glass from MOCl5 and 2P(C6H11)H-2. The atmospheric pressure depositions are carried out at 550 and 600degreesC producing silver brown shiny films. The composition of the film is shown to be MoP1.8 with a resistivity value of ca. 3800 muOmega cm. X-ray analysis of the deposited films indicates that they are amorphous. XPS analysis revealed binding energy shifts of 228.4 eV for Mo3d(5/2) and 128.8 eV for P2p. The deposits passed the scotch test and could not be scratched with steel or brass scalpels. They are also resistant to common solvents but dissolve in concentrated acids.

Original language	English
Pages (from-to)	10-+
Journal	Chemical Vapor Deposition
Volume	9
Issue number	1
Publication status	Published - 2003

Cite this

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title = "Dual-source atmospheric pressure CVD of amorphous molybdenum phosphide films on glass using molybdenum(v) chloride and cyclohexylphosphine",

abstract = "Molybdenum phosphide films are deposited on glass from MOCl5 and 2P(C6H11)H-2. The atmospheric pressure depositions are carried out at 550 and 600degreesC producing silver brown shiny films. The composition of the film is shown to be MoP1.8 with a resistivity value of ca. 3800 muOmega cm. X-ray analysis of the deposited films indicates that they are amorphous. XPS analysis revealed binding energy shifts of 228.4 eV for Mo3d(5/2) and 128.8 eV for P2p. The deposits passed the scotch test and could not be scratched with steel or brass scalpels. They are also resistant to common solvents but dissolve in concentrated acids.",

author = "Blackman, {C S} and Carmalt, {C J} and Manning, {T D} and O'Neill, {S A} and Parkin, {I P} and L Apostolico and Molloy, {K C}",

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language = "English",

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TY - JOUR

T1 - Dual-source atmospheric pressure CVD of amorphous molybdenum phosphide films on glass using molybdenum(v) chloride and cyclohexylphosphine

AU - Blackman, C S

AU - Carmalt, C J

AU - Manning, T D

AU - O'Neill, S A

AU - Parkin, I P

AU - Apostolico, L

AU - Molloy, K C

N1 - ID number: ISI:000180593600002

PY - 2003

Y1 - 2003

N2 - Molybdenum phosphide films are deposited on glass from MOCl5 and 2P(C6H11)H-2. The atmospheric pressure depositions are carried out at 550 and 600degreesC producing silver brown shiny films. The composition of the film is shown to be MoP1.8 with a resistivity value of ca. 3800 muOmega cm. X-ray analysis of the deposited films indicates that they are amorphous. XPS analysis revealed binding energy shifts of 228.4 eV for Mo3d(5/2) and 128.8 eV for P2p. The deposits passed the scotch test and could not be scratched with steel or brass scalpels. They are also resistant to common solvents but dissolve in concentrated acids.

AB - Molybdenum phosphide films are deposited on glass from MOCl5 and 2P(C6H11)H-2. The atmospheric pressure depositions are carried out at 550 and 600degreesC producing silver brown shiny films. The composition of the film is shown to be MoP1.8 with a resistivity value of ca. 3800 muOmega cm. X-ray analysis of the deposited films indicates that they are amorphous. XPS analysis revealed binding energy shifts of 228.4 eV for Mo3d(5/2) and 128.8 eV for P2p. The deposits passed the scotch test and could not be scratched with steel or brass scalpels. They are also resistant to common solvents but dissolve in concentrated acids.

M3 - Article

VL - 9

SP - 10-+

JO - Chemical Vapor Deposition

JF - Chemical Vapor Deposition

SN - 0948-1907

IS - 1

ER -

Dual-source atmospheric pressure CVD of amorphous molybdenum phosphide films on glass using molybdenum(v) chloride and cyclohexylphosphine

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