Dual source atmospheric pressure chemical vapour deposition of TiP films on glass using TiCl4 and PH2But

C Blackman; C J Carmalt; S A O'Neill; I P Parkin; L Apostilco; K C Molloy

doi:10.1039/b105140g

Dual source atmospheric pressure chemical vapour deposition of TiP films on glass using TiCl4 and PH2But

C Blackman, C J Carmalt, S A O'Neill, I P Parkin, L Apostilco, K C Molloy

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

19 Citations (SciVal)

Abstract

A facile new method for the preparation of large area titanium phosphide films on glass is described from the atmospheric pressure chemical vapour deposition of titanium tetrachloride and tert-butylphosphine.

Original language	English
Pages (from-to)	2408-2409
Number of pages	2
Journal	Journal of Materials Chemistry
Volume	11
Issue number	10
DOIs	https://doi.org/10.1039/b105140g
Publication status	Published - 2001

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ID number: ISI:000171470500002

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@article{b01fc9dad3f84cc4ac532e8ab966264f,

title = "Dual source atmospheric pressure chemical vapour deposition of TiP films on glass using TiCl4 and PH2But",

abstract = "A facile new method for the preparation of large area titanium phosphide films on glass is described from the atmospheric pressure chemical vapour deposition of titanium tetrachloride and tert-butylphosphine.",

author = "C Blackman and Carmalt, \{C J\} and O'Neill, \{S A\} and Parkin, \{I P\} and L Apostilco and Molloy, \{K C\}",

note = "ID number: ISI:000171470500002",

year = "2001",

doi = "10.1039/b105140g",

language = "English",

volume = "11",

pages = "2408--2409",

journal = "Journal of Materials Chemistry",

issn = "0959-9428",

publisher = "Royal Society of Chemistry",

number = "10",

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TY - JOUR

T1 - Dual source atmospheric pressure chemical vapour deposition of TiP films on glass using TiCl4 and PH2But

AU - Blackman, C

AU - Carmalt, C J

AU - O'Neill, S A

AU - Parkin, I P

AU - Apostilco, L

AU - Molloy, K C

N1 - ID number: ISI:000171470500002

PY - 2001

Y1 - 2001

N2 - A facile new method for the preparation of large area titanium phosphide films on glass is described from the atmospheric pressure chemical vapour deposition of titanium tetrachloride and tert-butylphosphine.

AB - A facile new method for the preparation of large area titanium phosphide films on glass is described from the atmospheric pressure chemical vapour deposition of titanium tetrachloride and tert-butylphosphine.

UR - https://www.scopus.com/pages/publications/0034776683

U2 - 10.1039/b105140g

DO - 10.1039/b105140g

M3 - Article

SN - 0959-9428

VL - 11

SP - 2408

EP - 2409

JO - Journal of Materials Chemistry

JF - Journal of Materials Chemistry

IS - 10

ER -

Dual source atmospheric pressure chemical vapour deposition of TiP films on glass using TiCl4 and PH2But

Abstract

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