Projects per year
Abstract
We describe a new low-cost nanolithographic tool for creating periodic arrays of complex, nano-motifs, across large areas within minutes. Displacement Talbot lithography is combined with lateral nanopositioning to enable large-area patterning with the flexibility of a direct-write system. In this way, we can create different periodic patterns in short timescales using a single mask with no mask degradation. We demonstrate multiple exposures, combined with discrete lateral displacements, and single exposures, with continuous displacements, to achieve image inversion, pitch reduction, and nanogaps between metal nanoparticles. Our approach provides a flexible route to create large-area nanopatterned materials and devices in high volumes.
Original language | English |
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Pages (from-to) | 32037-32046 |
Number of pages | 10 |
Journal | Optics Express |
Volume | 27 |
Issue number | 22 |
DOIs | |
Publication status | Published - 28 Oct 2019 |
Funding
Engineering and Physical Sciences Research Council (EP/M015181/1, EP/M022862/1). PC performed the experiments from an idea conceived by ELB & PAS. PAS & PC wrote the article, with critical reading by PMC. All data created during this research is openly available from the University of Bath Research Data Archive at https://doi.org/10.15125/BATH-00709.
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
Fingerprint
Dive into the research topics of '“Double” displacement Talbot lithography: Fast, wafer-scale, direct-writing of complex periodic nanopatterns'. Together they form a unique fingerprint.Projects
- 2 Finished
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Manufacturing of Nano-Engineered III-N Semiconductors
Shields, P. (PI), Allsopp, D. (CoI) & Wang, W. (CoI)
Engineering and Physical Sciences Research Council
1/05/15 → 30/09/21
Project: Research council
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Manufacturing of Nano-Engineered III-N Semiconductors - Equipment
Shields, P. (PI) & Allsopp, D. (CoI)
Engineering and Physical Sciences Research Council
1/02/15 → 31/01/20
Project: Research council
Profiles
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Philip Shields
- Department of Electronic & Electrical Engineering - Senior Lecturer
- Centre for Nanoscience and Nanotechnology
- Centre for Sustainable Chemical Technologies (CSCT)
- Condensed Matter Physics CDT
- Electronics Materials, Circuits & Systems Research Unit (EMaCS)
- Centre for Integrated Materials, Processes & Structures (IMPS)
Person: Research & Teaching, Core staff
Datasets
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Dataset for "‘Double’ Displacement Talbot Lithography: fast, wafer-scale, direct-writing of complex periodic nanopatterns"
Chausse, P. (Creator), Le Boulbar, E. (Creator), Coulon, P.-M. (Creator) & Shields, P. (Creator), University of Bath, 18 Oct 2019
DOI: 10.15125/BATH-00709
Dataset