Displacement sensing with silicon flexures in MEMS nanopositioners

Ali Mohammadi; A. Bazaei; M. Marofi; S. O. R. Moheimani

doi:10.1109/JMEMS.2014.2316325

Displacement sensing with silicon flexures in MEMS nanopositioners

Ali Mohammadi, A. Bazaei, M. Marofi, S. O. R. Moheimani

Department of Electronic & Electrical Engineering

Research output: Contribution to journal › Article › peer-review

24 Citations (SciVal)

Original language	English
Article number	5
Pages (from-to)	502-504
Number of pages	3
Journal	IEEE/ASME Journal of Microelectromechancial Systems
Volume	23
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2014.2316325
Publication status	Published - 29 Apr 2014

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10.1109/JMEMS.2014.2316325

Ali Mohammadi
- A.Mohammadibath.acuk
Person: Research & Teaching, Core staff, Affiliate staff

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title = "Displacement sensing with silicon flexures in MEMS nanopositioners",

author = "Ali Mohammadi and A. Bazaei and M. Marofi and Moheimani, {S. O. R.}",

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T1 - Displacement sensing with silicon flexures in MEMS nanopositioners

AU - Mohammadi, Ali

AU - Bazaei, A.

AU - Marofi, M.

AU - Moheimani, S. O. R.

PY - 2014/4/29

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DO - 10.1109/JMEMS.2014.2316325

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EP - 504

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 3

M1 - 5

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Displacement sensing with silicon flexures in MEMS nanopositioners

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Ali Mohammadi

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