Displacement sensing with silicon flexures in MEMS nanopositioners

Ali Mohammadi, A. Bazaei, M. Marofi, S. O. R. Moheimani

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Original language	English
Article number	5
Pages (from-to)	502-504
Number of pages	3
Journal	IEEE/ASME Journal of Microelectromechancial Systems
Volume	23
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2014.2316325
Publication status	Published - 29 Apr 2014

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title = "Displacement sensing with silicon flexures in MEMS nanopositioners",

author = "Ali Mohammadi and A. Bazaei and M. Marofi and Moheimani, {S. O. R.}",

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AU - Mohammadi, Ali

AU - Bazaei, A.

AU - Marofi, M.

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