Displacement sensing with silicon flexures in MEMS nanopositioners

Ali Mohammadi, A. Bazaei, M. Marofi, S. O. R. Moheimani

Research output: Contribution to journalArticle

22 Citations (Scopus)
Original languageEnglish
Article number5
Pages (from-to)502-504
Number of pages3
JournalIEEE/ASME Journal of Microelectromechancial Systems
Volume23
Issue number3
DOIs
Publication statusPublished - 29 Apr 2014

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