Original language | English |
---|---|
Article number | 5 |
Pages (from-to) | 502-504 |
Number of pages | 3 |
Journal | IEEE/ASME Journal of Microelectromechancial Systems |
Volume | 23 |
Issue number | 3 |
DOIs | |
Publication status | Published - 29 Apr 2014 |
Displacement sensing with silicon flexures in MEMS nanopositioners
Ali Mohammadi, A. Bazaei, M. Marofi, S. O. R. Moheimani
Research output: Contribution to journal › Article › peer-review
24
Citations
(SciVal)