Direct pressure sensing with carbon nanotubes grown in a micro-cavity

Ashok Chauhan; Alain Nogaret

doi:10.1063/1.4811166

Direct pressure sensing with carbon nanotubes grown in a micro-cavity

Ashok Chauhan, Alain Nogaret

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Abstract

We report on the growth of multiwall carbon nanotubes (CNTs) at the centre of a bow tie micro-cavity and describe the change in resistance of these CNTs under gas pressure loading (ΔR/R ≅ 16%/atm). By adapting the Euler-Bernoulli theory of beams to CNTs that bridge opposite walls of the cavity, we fit the piezoresistance curves and extract the Young's modulus, the piezoresistive constant, and the nanotube radius, for a range of CNT growth conditions. By detecting pressures as low as 0.1 atm, we demonstrate a membrane-less technology capable of sensing pressure with micron scale resolution.

Original language	English
Article number	233507
Number of pages	4
Journal	Applied Physics Letters
Volume	102
Issue number	23
DOIs	https://doi.org/10.1063/1.4811166
Publication status	Published - 12 Jun 2013

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10.1063/1.4811166

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Copyright (2013) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Chauhan, A & Nogaret, A 2013, 'Direct pressure sensing with carbon nanotubes grown in a micro-cavity' Applied Physics Letters, vol 102, 233507 and may be found at http://link.aip.org/link/doi/10.1063/1.4811166
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abstract = "We report on the growth of multiwall carbon nanotubes (CNTs) at the centre of a bow tie micro-cavity and describe the change in resistance of these CNTs under gas pressure loading (ΔR/R ≅ 16%/atm). By adapting the Euler-Bernoulli theory of beams to CNTs that bridge opposite walls of the cavity, we fit the piezoresistance curves and extract the Young's modulus, the piezoresistive constant, and the nanotube radius, for a range of CNT growth conditions. By detecting pressures as low as 0.1 atm, we demonstrate a membrane-less technology capable of sensing pressure with micron scale resolution.",

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AB - We report on the growth of multiwall carbon nanotubes (CNTs) at the centre of a bow tie micro-cavity and describe the change in resistance of these CNTs under gas pressure loading (ΔR/R ≅ 16%/atm). By adapting the Euler-Bernoulli theory of beams to CNTs that bridge opposite walls of the cavity, we fit the piezoresistance curves and extract the Young's modulus, the piezoresistive constant, and the nanotube radius, for a range of CNT growth conditions. By detecting pressures as low as 0.1 atm, we demonstrate a membrane-less technology capable of sensing pressure with micron scale resolution.

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Direct pressure sensing with carbon nanotubes grown in a micro-cavity

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