Development of a MEMS position transducer using bulk piezoresistivity of suspensions

Ali Bazaei, Mohammad Maroufi, Ali Mohammadi, S. O.Reza Moheimani

Research output: Chapter or section in a book/report/conference proceedingChapter in a published conference proceeding

2 Citations (SciVal)

Abstract

This paper addresses a new position transducer for nanopositioners fabricated through a standard micro-electromechanical systems (MEMS) process. The sensor works based on bulk piezoresistivity of a pair of single-crystal silicon beams, which suspend a nanopositioner stage. The beams are deliberately angled to experience opposite axial forces during the motion, yielding opposite piezoresistive changes in their resistances. A Wheatstone bridge and an instrumentation amplifier differentially transform the changes in the beam resistances into the output voltage of the sensor. In comparison with a sensors employing just one monocrystalline or polycrystalline silicon flexible beam as piezoresistor, the proposed design has considerably more linear characteristics, higher resolution and dynamic range, as well as lower noise and drift.

Original languageEnglish
Title of host publicationAIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
PublisherIEEE
Pages1469-1473
Number of pages5
ISBN (Print)9781479957361
DOIs
Publication statusPublished - 14 Aug 2014
Event2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 - Besancon, France
Duration: 8 Jul 201411 Jul 2014

Publication series

NameInternational Conference on Advanced Intelligent Mechatronics
PublisherIEEE/ASME
ISSN (Print)2159-6247
ISSN (Electronic)2159-6255

Conference

Conference2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014
Country/TerritoryFrance
CityBesancon
Period8/07/1411/07/14

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Software
  • Computer Science Applications
  • Electrical and Electronic Engineering

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