Development of a MEMS position transducer using bulk piezoresistivity of suspensions

Ali Bazaei; Mohammad Maroufi; Ali Mohammadi; S. O.Reza Moheimani

doi:10.1109/AIM.2014.6878290

Development of a MEMS position transducer using bulk piezoresistivity of suspensions

Ali Bazaei, Mohammad Maroufi, Ali Mohammadi, S. O.Reza Moheimani

Department of Electronic & Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper addresses a new position transducer for nanopositioners fabricated through a standard micro-electromechanical systems (MEMS) process. The sensor works based on bulk piezoresistivity of a pair of single-crystal silicon beams, which suspend a nanopositioner stage. The beams are deliberately angled to experience opposite axial forces during the motion, yielding opposite piezoresistive changes in their resistances. A Wheatstone bridge and an instrumentation amplifier differentially transform the changes in the beam resistances into the output voltage of the sensor. In comparison with a sensors employing just one monocrystalline or polycrystalline silicon flexible beam as piezoresistor, the proposed design has considerably more linear characteristics, higher resolution and dynamic range, as well as lower noise and drift.

Original language	English
Title of host publication	AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
Publisher	IEEE
Pages	1469-1473
Number of pages	5
ISBN (Print)	9781479957361
DOIs	https://doi.org/10.1109/AIM.2014.6878290
Publication status	Published - 14 Aug 2014
Event	2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 - Besancon, France Duration: 8 Jul 2014 → 11 Jul 2014

Publication series

Name	International Conference on Advanced Intelligent Mechatronics
Publisher	IEEE/ASME
ISSN (Print)	2159-6247
ISSN (Electronic)	2159-6255

Conference

Conference	2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014
Country	France
City	Besancon
Period	8/07/14 → 11/07/14

ASJC Scopus subject areas

Control and Systems Engineering
Software
Computer Science Applications
Electrical and Electronic Engineering

Access to Document

10.1109/AIM.2014.6878290

Link to publication in Scopus

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Cite this

Bazaei, A., Maroufi, M., Mohammadi, A., & Moheimani, S. O. R. (2014). Development of a MEMS position transducer using bulk piezoresistivity of suspensions. In AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics (pp. 1469-1473). [6878290] (International Conference on Advanced Intelligent Mechatronics). IEEE. https://doi.org/10.1109/AIM.2014.6878290

Development of a MEMS position transducer using bulk piezoresistivity of suspensions. / Bazaei, Ali; Maroufi, Mohammad; Mohammadi, Ali; Moheimani, S. O.Reza.

AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. IEEE, 2014. p. 1469-1473 6878290 (International Conference on Advanced Intelligent Mechatronics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Bazaei, A, Maroufi, M, Mohammadi, A & Moheimani, SOR 2014, Development of a MEMS position transducer using bulk piezoresistivity of suspensions. in AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics., 6878290, International Conference on Advanced Intelligent Mechatronics, IEEE, pp. 1469-1473, 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014, Besancon, France, 8/07/14. https://doi.org/10.1109/AIM.2014.6878290

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