TY - GEN
T1 - Development of a MEMS position transducer using bulk piezoresistivity of suspensions
AU - Bazaei, Ali
AU - Maroufi, Mohammad
AU - Mohammadi, Ali
AU - Moheimani, S. O.Reza
PY - 2014/8/14
Y1 - 2014/8/14
N2 - This paper addresses a new position transducer for nanopositioners fabricated through a standard micro-electromechanical systems (MEMS) process. The sensor works based on bulk piezoresistivity of a pair of single-crystal silicon beams, which suspend a nanopositioner stage. The beams are deliberately angled to experience opposite axial forces during the motion, yielding opposite piezoresistive changes in their resistances. A Wheatstone bridge and an instrumentation amplifier differentially transform the changes in the beam resistances into the output voltage of the sensor. In comparison with a sensors employing just one monocrystalline or polycrystalline silicon flexible beam as piezoresistor, the proposed design has considerably more linear characteristics, higher resolution and dynamic range, as well as lower noise and drift.
AB - This paper addresses a new position transducer for nanopositioners fabricated through a standard micro-electromechanical systems (MEMS) process. The sensor works based on bulk piezoresistivity of a pair of single-crystal silicon beams, which suspend a nanopositioner stage. The beams are deliberately angled to experience opposite axial forces during the motion, yielding opposite piezoresistive changes in their resistances. A Wheatstone bridge and an instrumentation amplifier differentially transform the changes in the beam resistances into the output voltage of the sensor. In comparison with a sensors employing just one monocrystalline or polycrystalline silicon flexible beam as piezoresistor, the proposed design has considerably more linear characteristics, higher resolution and dynamic range, as well as lower noise and drift.
UR - http://www.scopus.com/inward/record.url?scp=84906709001&partnerID=8YFLogxK
U2 - 10.1109/AIM.2014.6878290
DO - 10.1109/AIM.2014.6878290
M3 - Conference contribution
AN - SCOPUS:84906709001
SN - 9781479957361
T3 - International Conference on Advanced Intelligent Mechatronics
SP - 1469
EP - 1473
BT - AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
PB - IEEE
T2 - 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014
Y2 - 8 July 2014 through 11 July 2014
ER -