Development of a MEMS position transducer using bulk piezoresistivity of suspensions

Ali Bazaei, Mohammad Maroufi, Ali Mohammadi, S. O.Reza Moheimani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper addresses a new position transducer for nanopositioners fabricated through a standard micro-electromechanical systems (MEMS) process. The sensor works based on bulk piezoresistivity of a pair of single-crystal silicon beams, which suspend a nanopositioner stage. The beams are deliberately angled to experience opposite axial forces during the motion, yielding opposite piezoresistive changes in their resistances. A Wheatstone bridge and an instrumentation amplifier differentially transform the changes in the beam resistances into the output voltage of the sensor. In comparison with a sensors employing just one monocrystalline or polycrystalline silicon flexible beam as piezoresistor, the proposed design has considerably more linear characteristics, higher resolution and dynamic range, as well as lower noise and drift.

Original languageEnglish
Title of host publicationAIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
PublisherIEEE
Pages1469-1473
Number of pages5
ISBN (Print)9781479957361
DOIs
Publication statusPublished - 14 Aug 2014
Event2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 - Besancon, France
Duration: 8 Jul 201411 Jul 2014

Publication series

NameInternational Conference on Advanced Intelligent Mechatronics
PublisherIEEE/ASME
ISSN (Print)2159-6247
ISSN (Electronic)2159-6255

Conference

Conference2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014
CountryFrance
CityBesancon
Period8/07/1411/07/14

Fingerprint

MEMS
Transducers
Sensors
Monocrystalline silicon
Polysilicon
Single crystals
Silicon
Electric potential

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Software
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Bazaei, A., Maroufi, M., Mohammadi, A., & Moheimani, S. O. R. (2014). Development of a MEMS position transducer using bulk piezoresistivity of suspensions. In AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics (pp. 1469-1473). [6878290] (International Conference on Advanced Intelligent Mechatronics). IEEE. https://doi.org/10.1109/AIM.2014.6878290

Development of a MEMS position transducer using bulk piezoresistivity of suspensions. / Bazaei, Ali; Maroufi, Mohammad; Mohammadi, Ali; Moheimani, S. O.Reza.

AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. IEEE, 2014. p. 1469-1473 6878290 (International Conference on Advanced Intelligent Mechatronics).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bazaei, A, Maroufi, M, Mohammadi, A & Moheimani, SOR 2014, Development of a MEMS position transducer using bulk piezoresistivity of suspensions. in AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics., 6878290, International Conference on Advanced Intelligent Mechatronics, IEEE, pp. 1469-1473, 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014, Besancon, France, 8/07/14. https://doi.org/10.1109/AIM.2014.6878290
Bazaei A, Maroufi M, Mohammadi A, Moheimani SOR. Development of a MEMS position transducer using bulk piezoresistivity of suspensions. In AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. IEEE. 2014. p. 1469-1473. 6878290. (International Conference on Advanced Intelligent Mechatronics). https://doi.org/10.1109/AIM.2014.6878290
Bazaei, Ali ; Maroufi, Mohammad ; Mohammadi, Ali ; Moheimani, S. O.Reza. / Development of a MEMS position transducer using bulk piezoresistivity of suspensions. AIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics. IEEE, 2014. pp. 1469-1473 (International Conference on Advanced Intelligent Mechatronics).
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