Abstract
A miniature rotating gyroscope is described, in which a 0.5 mm aluminum rotor is levitated, rotated, and constrained by a combination of electromagnetic induction and electrostatic forces generated from a unique planar coil design. Integrated into the planar coil design are the sense electrodes that allow the angular-rate of the device to be measured about two orthogonal axes, and acceleration along the third, producing a multimode inertial sensor. In this paper, the results of electrostatic, rotation, and thermal measurements, together with the finite element and analytical modelling are presented. Excellent agreement is found between the electromagnetic and electrostatic experimental measurements and modelling. A simple viscous drag model is proposed to explain the experimental rotational measurements and its limitations are discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 85-92 |
| Number of pages | 8 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 83 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 22 May 2000 |
| Event | The 10th International Conference on Solid-State Sensors and Actuators TRANSDUCERS '99 - Sendai, Jpn Duration: 7 Jun 1999 → 10 Jun 1999 |
Bibliographical note
Funding Information:We gratefully acknowledge contributions from R.B. Yates, P.H. Mellor, P. Haines, and J. Raeburn as well as the continued funding from the National Science Technology Board of Singapore.
Funding Information:
Andrew K. Y. Ho received a BEng (Honours) in Mechanical and Production Engineering from NTU, Singapore in 1998, and is presently pursuing an MEng Degree. His research is funded by the National Science Technology Board of Singapore and is related to MEMS.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering