Deposition behavior of GaN in AIX 200/4 RF-S horizontal reactor

E V Yakovlev, R A Talalaev, Y N Makarov, B S Yavich, W N Wang

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Fingerprint Dive into the research topics of 'Deposition behavior of GaN in AIX 200/4 RF-S horizontal reactor'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science