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Abstract

Three-dimensional core–shell nanostructures could resolve key problems existing in conventional planar deep UV light-emitting diode (LED) technology due to their high structural quality, high-quality nonpolar growth leading to a reduced quantum-confined Stark effect and their ability to improve light extraction. Currently, a major hurdle to their implementation in UV LEDs is the difficulty of growing such nanostructures from AlxGa1–xN materials with a bottom-up approach. In this paper, we report the successful fabrication of an AlN/AlxGa1–xN/AlN core–shell structure using an original hybrid top-down/bottom-up approach, thus representing a breakthrough in applying core–shell architecture to deep UV emission. Various AlN/AlxGa1–xN/AlN core–shell structures were grown on optimized AlN nanorod arrays. These were created using displacement Talbot lithography (DTL), a two-step dry-wet etching process, and optimized AlN metal organic vapor phase epitaxy regrowth conditions to achieve the facet recovery of straight and smooth AlN nonpolar facets, a necessary requirement for subsequent growth. Cathodoluminescence hyperspectral imaging of the emission characteristics revealed that 229 nm deep UV emission was achieved from the highly uniform array of core–shell AlN/AlxGa1–xN/AlN structures, which represents the shortest wavelength achieved so far with a core–shell architecture. This hybrid top-down/bottom-up approach represents a major advance for the fabrication of deep UV LEDs based on core–shell nanostructures.
Original languageEnglish
Pages (from-to)33441-33449
Number of pages9
JournalACS Applied Materials and Interfaces
Volume10
Issue number39
Early online date6 Sep 2018
DOIs
Publication statusPublished - 3 Oct 2018

Fingerprint

Nanorods
Nanostructures
Light emitting diodes
Stark effect
Fabrication
Dry etching
Vapor phase epitaxy
Cathodoluminescence
Wet etching
Ultraviolet radiation
Lithography
Diodes
Metals
Recovery
Wavelength
aluminum gallium nitride

Keywords

  • AlGaN
  • AlN
  • EDX
  • TEM
  • cathodoluminescence
  • core-shell
  • nanorod

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Deep UV Emission from Highly Ordered AlGaN/AlN Core–Shell Nanorods. / Coulon, Pierre-Marie; Kusch, Gunnar; Martin, Robert W.; Shields, Philip A.

In: ACS Applied Materials and Interfaces, Vol. 10, No. 39, 03.10.2018, p. 33441-33449.

Research output: Contribution to journalArticle

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