@inproceedings{db1d93fa84414837a54696babeecb7f0,
title = "Dealing with 1/f noise in MEMS electrothermal sensing",
abstract = "Electrothermal sensing has been under investigation as a viable means of measuring displacement in micromachined transducers. Compared with capacitive sensors, electrothermal sensors have the advantage of being realizable with an extremely small footprint, which makes them very attractive in MEMS. These sensors are prone to 1/f noise, and therefore are inferior to their capacitive counterparts at very low frequencies. We propose a novel read out circuit and illustrate that it can achieve a significant reduction in the noise associated with electrothermal sensors. ",
author = "A. Mohammadi and Yuce, {Mehmet R.} and Moheimani, {S. O. R.}",
year = "2012",
month = jan,
day = "3",
doi = "10.1109/IECON.2011.6119974",
language = "English",
isbn = "9781612849690",
series = "Annual Conference of the IEEE Industrial Electronics Society",
publisher = "IEEE",
pages = "4054--4058",
booktitle = "Proceedings of IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society",
address = "USA United States",
note = "37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011 ; Conference date: 07-11-2011 Through 10-11-2011",
}