Dealing with 1/f noise in MEMS electrothermal sensing

A. Mohammadi, Mehmet R. Yuce, S. O. R. Moheimani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Electrothermal sensing has been under investigation as a viable means of measuring displacement in micromachined transducers. Compared with capacitive sensors, electrothermal sensors have the advantage of being realizable with an extremely small footprint, which makes them very attractive in MEMS. These sensors are prone to 1/f noise, and therefore are inferior to their capacitive counterparts at very low frequencies. We propose a novel read out circuit and illustrate that it can achieve a significant reduction in the noise associated with electrothermal sensors.

Original languageEnglish
Title of host publicationProceedings of IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society
Place of PublicationU. S. A.
PublisherIEEE
Pages4054-4058
Number of pages5
ISBN (Print)9781612849690
DOIs
Publication statusPublished - 3 Jan 2012
Event37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011 - Melbourne, VIC, Australia
Duration: 7 Nov 201110 Nov 2011

Publication series

NameAnnual Conference of the IEEE Industrial Electronics Society
PublisherIEEE
ISSN (Print)1553-572X

Conference

Conference37th Annual Conference of the IEEE Industrial Electronics Society, IECON 2011
CountryAustralia
CityMelbourne, VIC
Period7/11/1110/11/11

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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