@inproceedings{45fa526606234102bbb2609fd58b182f,
title = "Control of a MEMS nanopositioner for atomic force microscopy",
abstract = "A 2 DoF MEMS-based nanopositioner with integrated electrothermal sensors for on-chip AFM applications is presented. The electrothermal sensors consist of a pair of 50-μm long silicon heaters that operate in a differential mode. It is demonstrated in this work that the sensor measurements can be used in feedback control loops to improve the quality of AFM images during high-speed raster scanning. The x and y resonance frequencies of the MEMS-based nanopositioner appear at 815 Hz and 800 Hz respectively. To obtain high-speed AFM images, a positive position feedback (PPF) controller is designed to damp the resonant mode of the fast axis and an integrator is used to achieve satisfactory tracking. For the slow axis, a notch filter and an integrator are implemented to track a slow ramp signal. To further increase the tracking bandwidth of the fast axis, an inversion-based feedforward technique is combined with the PPF and integral feedback loops. With the proposed feedforward-feedback control strategy, high-quality AFM images up to 50 Hz line rate are obtained without noticeable vibration-induced artifacts. ",
keywords = "AFM, Electrothermal sensor, Feedback, Feedforward, MEMS, Nanopositioning",
author = "Yong, {Y. K.} and Fowler, {Anthony G.} and A. Mohammadi and Moheimani, {S. O. R.}",
year = "2013",
month = dec,
day = "31",
doi = "10.3182/20130410-3-CN-2034.00038",
language = "English",
volume = "46",
series = "IFAC Proceedings Volumes",
publisher = "Elsevier",
pages = "375--382",
booktitle = "IFAC Proceedings Volumes",
address = "Netherlands",
edition = "5",
note = "6th IFAC Symposium on Mechatronic Systems, MECH 2013 ; Conference date: 10-04-2013 Through 12-04-2013",
}