Chemical vapour deposition of group Vb metal phosphide thin films

C S Blackman, C J Carmalt, S A O'Neill, I P Parkin, K C Molloy, L Apostolico

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Abstract

The atmospheric pressure chemical vapour deposition (APCVD) reaction of VCl4 or VOCl3 with cyclohexylphosphine at substrate temperatures of 600 degreesC deposits thin films of amorphous vanadium phosphide. The films are black - gold, hard, chemically resistant and conductive. The APCVD reaction of MCl5 (where M = Nb or Ta) with cyclohexylphosphine at 500 - 600 degreesC deposits films of crystalline beta-MP and at 400 degreesC - 450 degreesC amorphous films of stoichiometry MP are formed. The MP films are metallic, conductive, adherent and chemically resistant.
Original languageEnglish
Pages (from-to)1930-1935
Number of pages6
JournalJournal of Materials Chemistry
Volume13
Issue number8
DOIs
Publication statusPublished - 2003

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    Blackman, C. S., Carmalt, C. J., O'Neill, S. A., Parkin, I. P., Molloy, K. C., & Apostolico, L. (2003). Chemical vapour deposition of group Vb metal phosphide thin films. Journal of Materials Chemistry, 13(8), 1930-1935. https://doi.org/10.1039/b304084b