Chemical vapour deposition of crystalline thin films of tantalum phosphide

C S Blackman, C J Carmalt, I P Parkin, S A O'Neill, K C Molloy, L Apostolico

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Tantalum phosphide coatings were prepared by chemical vapour deposition reaction of TaCl5 and PH2Cy at 350-500 degreesC. The films are hard, stable to corrosive environments and show reflection properties in the infrared. (C) 2002 Elsevier Science B.V. All rights reserved.
Original languageEnglish
Pages (from-to)2634-2636
Number of pages3
JournalMaterials Letters
Volume57
Issue number18
DOIs
Publication statusPublished - 2003

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Tantalum
Caustics
phosphides
tantalum
Chemical vapor deposition
vapor deposition
Crystalline materials
Infrared radiation
coatings
Thin films
Coatings
thin films

Cite this

Blackman, C. S., Carmalt, C. J., Parkin, I. P., O'Neill, S. A., Molloy, K. C., & Apostolico, L. (2003). Chemical vapour deposition of crystalline thin films of tantalum phosphide. Materials Letters, 57(18), 2634-2636. https://doi.org/10.1016/s0167-577x(02)01341-1

Chemical vapour deposition of crystalline thin films of tantalum phosphide. / Blackman, C S; Carmalt, C J; Parkin, I P; O'Neill, S A; Molloy, K C; Apostolico, L.

In: Materials Letters, Vol. 57, No. 18, 2003, p. 2634-2636.

Research output: Contribution to journalArticle

Blackman, CS, Carmalt, CJ, Parkin, IP, O'Neill, SA, Molloy, KC & Apostolico, L 2003, 'Chemical vapour deposition of crystalline thin films of tantalum phosphide', Materials Letters, vol. 57, no. 18, pp. 2634-2636. https://doi.org/10.1016/s0167-577x(02)01341-1
Blackman CS, Carmalt CJ, Parkin IP, O'Neill SA, Molloy KC, Apostolico L. Chemical vapour deposition of crystalline thin films of tantalum phosphide. Materials Letters. 2003;57(18):2634-2636. https://doi.org/10.1016/s0167-577x(02)01341-1
Blackman, C S ; Carmalt, C J ; Parkin, I P ; O'Neill, S A ; Molloy, K C ; Apostolico, L. / Chemical vapour deposition of crystalline thin films of tantalum phosphide. In: Materials Letters. 2003 ; Vol. 57, No. 18. pp. 2634-2636.
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