Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions

S Eslava, C.E.A. Kirschhock, S. Aldea, M.R. Baklanov, F. Iacopi, K. Maex, J.A. Martens

Research output: Contribution to journalArticle

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Abstract

Spin-on porous films were prepared on silicon wafers using Silicalite-1 nanozeolite suspensions crystallized from clear solution. The content and size of Silicalite-1 nanocrystals and of residual ∼2-4 nm nanoparticles in the starting suspensions were varied by varying the crystallization time. The films were characterized using scanning electron microscopy, X-ray diffraction, spectroscopic ellipsometry, atomic force microscopy, Fourier transform infrared spectroscopy, ellipsometric porosimetry, impedance analysis and nanoindentation. All the properties of spin-on Silicalite-1 films strongly depended on the composition of the Silicalite-1 suspensions spun onto the support. With increasing Silicalite-1 nanocrystal content, crystallinity, hydrophobicity and porosity increased, while elastic modulus, homogeneity, roughness, and dielectric constant decreased. Their implementation in on-chip interconnects is discussed.
LanguageEnglish
Pages458-466
Number of pages9
JournalMicroporous and Mesoporous Materials
Volume118
Issue number1-3
DOIs
StatusPublished - 1 Feb 2009

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Zeolites
Suspensions
Nanoparticles
nanoparticles
Nanocrystals
nanocrystals
Spectroscopic ellipsometry
Nanoindentation
Hydrophobicity
hydrophobicity
Crystallization
nanoindentation
Silicon wafers
ellipsometry
homogeneity
Fourier transform infrared spectroscopy
Atomic force microscopy
crystallinity
modulus of elasticity
Permittivity

Cite this

Eslava, S., Kirschhock, C. E. A., Aldea, S., Baklanov, M. R., Iacopi, F., Maex, K., & Martens, J. A. (2009). Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions. DOI: 10.1016/j.micromeso.2008.09.027

Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions. / Eslava, S; Kirschhock, C.E.A.; Aldea, S.; Baklanov, M.R.; Iacopi, F.; Maex, K.; Martens, J.A.

In: Microporous and Mesoporous Materials, Vol. 118, No. 1-3, 01.02.2009, p. 458-466.

Research output: Contribution to journalArticle

Eslava, S, Kirschhock, CEA, Aldea, S, Baklanov, MR, Iacopi, F, Maex, K & Martens, JA 2009, 'Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions' Microporous and Mesoporous Materials, vol. 118, no. 1-3, pp. 458-466. DOI: 10.1016/j.micromeso.2008.09.027
Eslava S, Kirschhock CEA, Aldea S, Baklanov MR, Iacopi F, Maex K et al. Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions. Microporous and Mesoporous Materials. 2009 Feb 1;118(1-3):458-466. Available from, DOI: 10.1016/j.micromeso.2008.09.027
Eslava, S ; Kirschhock, C.E.A. ; Aldea, S. ; Baklanov, M.R. ; Iacopi, F. ; Maex, K. ; Martens, J.A./ Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions. In: Microporous and Mesoporous Materials. 2009 ; Vol. 118, No. 1-3. pp. 458-466
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