Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions

S Eslava, C.E.A. Kirschhock, S. Aldea, M.R. Baklanov, F. Iacopi, K. Maex, J.A. Martens

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20 Citations (SciVal)


Spin-on porous films were prepared on silicon wafers using Silicalite-1 nanozeolite suspensions crystallized from clear solution. The content and size of Silicalite-1 nanocrystals and of residual ∼2-4 nm nanoparticles in the starting suspensions were varied by varying the crystallization time. The films were characterized using scanning electron microscopy, X-ray diffraction, spectroscopic ellipsometry, atomic force microscopy, Fourier transform infrared spectroscopy, ellipsometric porosimetry, impedance analysis and nanoindentation. All the properties of spin-on Silicalite-1 films strongly depended on the composition of the Silicalite-1 suspensions spun onto the support. With increasing Silicalite-1 nanocrystal content, crystallinity, hydrophobicity and porosity increased, while elastic modulus, homogeneity, roughness, and dielectric constant decreased. Their implementation in on-chip interconnects is discussed.
Original languageEnglish
Pages (from-to)458-466
Number of pages9
JournalMicroporous and Mesoporous Materials
Issue number1-3
Publication statusPublished - 1 Feb 2009


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