Characterization of amorphous silicon deposited at high rate by helium dilution PECVD and used for applications in radiation detection

Adelina Ilie, T Pochet, F Foulon, B Equer

Research output: Contribution to journalArticle

Fingerprint Dive into the research topics of 'Characterization of amorphous silicon deposited at high rate by helium dilution PECVD and used for applications in radiation detection'. Together they form a unique fingerprint.

Physics & Astronomy