CFD optimisation of up-flow vertical HVPE reactor for GaN growth

Lucasz J. Sytniewski, Alexei A. Lapkin, Sergey Stepanov, Wang N. Wang

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

An up-flow hot wall hydride vapour phase epitaxy (HVPE) reactor with a single stationary substrate was designed for the growth of thick free-standing GaN substrates. The influences of (i) the reactor chamber geometry and aspect ratio, (ii) the orientation of the reaction chamber along the gravity field, (iii) the reactants' composition, (iv) the total flow through reactor, and (v) the pressure were systematically investigated using a computational fluid dynamics (CFD) model. The relative importance of the geometry vs the operating conditions is discussed. The reactor optimisation was performed against specific design objectives of high growth rate, high uniformity of the reactants' concentrations near the substrate and the efficiency of utilisation of the metal precursor. The results show that it is possible to achieve good uniformity for both ammonia and gallium chloride, with the V/III molar ratio around 10 near substrate at the absolute reactor chamber pressure 1 bar. The GaN growth rate was estimated to be similar to 400 mu m h(-1) assuming 100% conversion of molecules reaching the substrate. These performance criteria allow practical realisation of an efficient reactor system.
Original languageEnglish
Pages (from-to)3358-3365
Number of pages8
JournalJournal of Crystal Growth
Volume310
Issue number14
Early online date17 Apr 2008
DOIs
Publication statusPublished - 1 Jul 2008

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Vapor phase epitaxy
computational fluid dynamics
Hydrides
vapor phase epitaxy
hydrides
Computational fluid dynamics
reactors
optimization
Substrates
chambers
Geometry
Gallium
pressure chambers
Ammonia
Aspect ratio
geometry
Dynamic models
Gravitation
dynamic models
Metals

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Sytniewski, L. J., Lapkin, A. A., Stepanov, S., & Wang, W. N. (2008). CFD optimisation of up-flow vertical HVPE reactor for GaN growth. Journal of Crystal Growth, 310(14), 3358-3365. https://doi.org/10.1016/j.jcrysgro.2008.04.017

CFD optimisation of up-flow vertical HVPE reactor for GaN growth. / Sytniewski, Lucasz J.; Lapkin, Alexei A.; Stepanov, Sergey; Wang, Wang N.

In: Journal of Crystal Growth, Vol. 310, No. 14, 01.07.2008, p. 3358-3365.

Research output: Contribution to journalArticle

Sytniewski, LJ, Lapkin, AA, Stepanov, S & Wang, WN 2008, 'CFD optimisation of up-flow vertical HVPE reactor for GaN growth', Journal of Crystal Growth, vol. 310, no. 14, pp. 3358-3365. https://doi.org/10.1016/j.jcrysgro.2008.04.017
Sytniewski, Lucasz J. ; Lapkin, Alexei A. ; Stepanov, Sergey ; Wang, Wang N. / CFD optimisation of up-flow vertical HVPE reactor for GaN growth. In: Journal of Crystal Growth. 2008 ; Vol. 310, No. 14. pp. 3358-3365.
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