Fingerprint
Dive into the research topics of 'BCl/N plasma for advanced non-Si gate patterning'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
BCl/N plasma for advanced non-Si gate patterning
D. Shamiryan, V. Paraschiv, S Eslava, M. Demand, M. Baklanov, W. Boullart
Research output: Chapter or section in a book/report/conference proceeding › Chapter or section