Atmospheric pressure CVD of antimony oxides

P W Haycock; G A Horley; K C Molloy; C R Myers; S A Rushworth; L M Smith

doi:10.1002/1521-3862(200109)7:5%3C191::AID-CVDE191%3E3.0.CO;2-U

Atmospheric pressure CVD of antimony oxides

P W Haycock, G A Horley, K C Molloy, C R Myers, S A Rushworth, L M Smith

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

Abstract

Communication: Thin films of Sb2O3 (senarmonite) have been deposited from antimony(III) n-butoxide at atmospheric pressure from 500 to 550 degreesC without the addition of a separate oxygen source. Films are analyzed using SEM (see Figure), EDX, and XRD, which indicates a strong (111) texture. On the other hand, the decomposition of antimony(iii) ethoxide in the same temperature range produces only antimony metal. However, when the deposition temperature is increased to 600 degreesC Sb6O13, is deposited.

Original language	English
Pages (from-to)	191-+
Journal	Chemical Vapor Deposition
Volume	7
Issue number	5
DOIs	https://doi.org/10.1002/1521-3862(200109)7:5%3C191::AID-CVDE191%3E3.0.CO;2-U
Publication status	Published - 2001

Bibliographical note

ID number: ISI:000170921200001

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10.1002/1521-3862(200109)7:5%3C191::AID-CVDE191%3E3.0.CO;2-U

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@article{bce67c85853043769de446155d70c7a7,

title = "Atmospheric pressure CVD of antimony oxides",

abstract = "Communication: Thin films of Sb2O3 (senarmonite) have been deposited from antimony(III) n-butoxide at atmospheric pressure from 500 to 550 degreesC without the addition of a separate oxygen source. Films are analyzed using SEM (see Figure), EDX, and XRD, which indicates a strong (111) texture. On the other hand, the decomposition of antimony(iii) ethoxide in the same temperature range produces only antimony metal. However, when the deposition temperature is increased to 600 degreesC Sb6O13, is deposited.",

author = "Haycock, \{P W\} and Horley, \{G A\} and Molloy, \{K C\} and Myers, \{C R\} and Rushworth, \{S A\} and Smith, \{L M\}",

note = "ID number: ISI:000170921200001",

year = "2001",

doi = "10.1002/1521-3862(200109)7:5\%3C191::AID-CVDE191\%3E3.0.CO;2-U",

language = "English",

volume = "7",

pages = "191--+",

journal = "Chemical Vapor Deposition",

issn = "0948-1907",

publisher = "Wiley-VCH Verlag",

number = "5",

}

TY - JOUR

T1 - Atmospheric pressure CVD of antimony oxides

AU - Haycock, P W

AU - Horley, G A

AU - Molloy, K C

AU - Myers, C R

AU - Rushworth, S A

AU - Smith, L M

N1 - ID number: ISI:000170921200001

PY - 2001

Y1 - 2001

N2 - Communication: Thin films of Sb2O3 (senarmonite) have been deposited from antimony(III) n-butoxide at atmospheric pressure from 500 to 550 degreesC without the addition of a separate oxygen source. Films are analyzed using SEM (see Figure), EDX, and XRD, which indicates a strong (111) texture. On the other hand, the decomposition of antimony(iii) ethoxide in the same temperature range produces only antimony metal. However, when the deposition temperature is increased to 600 degreesC Sb6O13, is deposited.

AB - Communication: Thin films of Sb2O3 (senarmonite) have been deposited from antimony(III) n-butoxide at atmospheric pressure from 500 to 550 degreesC without the addition of a separate oxygen source. Films are analyzed using SEM (see Figure), EDX, and XRD, which indicates a strong (111) texture. On the other hand, the decomposition of antimony(iii) ethoxide in the same temperature range produces only antimony metal. However, when the deposition temperature is increased to 600 degreesC Sb6O13, is deposited.

U2 - 10.1002/1521-3862(200109)7:5%3C191::AID-CVDE191%3E3.0.CO;2-U

DO - 10.1002/1521-3862(200109)7:5%3C191::AID-CVDE191%3E3.0.CO;2-U

M3 - Article

SN - 0948-1907

VL - 7

SP - 191-+

JO - Chemical Vapor Deposition

JF - Chemical Vapor Deposition

IS - 5

ER -

Atmospheric pressure CVD of antimony oxides

Abstract

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