Asymmetric Quad-Leg Orthoplanar Spring For Wideband Piezoelectric Micro-Energy Harvesting

Ali Mohammadi; Shamin Sadrafshari; Alborz Shokrani; Chris Bowen

doi:10.1109/MEMS49605.2023.10052512

Asymmetric Quad-Leg Orthoplanar Spring For Wideband Piezoelectric Micro-Energy Harvesting

Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding

6 Citations (SciVal)

278 Downloads (Pure)

Abstract

Piezoelectric energy harvesters (EH) generate their highest energy levels at the resonant frequencies of the transducer devices. To provide a wide-band EH solution, nonlinear mechanical resonators with multiple resonant modes can be used. We present a new asymmetric quad-leg orthoplanar spring (QOPS) EH microstructure to increase the harvesting bandwidth. The proposed design is implemented in CMOS compatible microfabrication processes. Finite element analysis show that the asymmetric designs increases the bandwidth by maximum 27% compared with symmetric designs. In order to measure the electrical output, one symmetric and three asymmetric piezoelectric devices implemented on the same microchip are exposed to mechanical vibrations over a wide frequency bandwidth. Experimental results approve the increase in the frequency bandwidth of resonators introduced by asymmetries added to the spring, as compared to the symmetrical configuration. © 2023 IEEE.

Original language	English
Title of host publication	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	IEEE
Pages	697-700
Number of pages	4
ISBN (Print)	9781665493086
DOIs	https://doi.org/10.1109/MEMS49605.2023.10052512
Publication status	E-pub ahead of print - 30 Jan 2023
Event	36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2023 - Munich, Germany Duration: 15 Jan 2023 → 19 Jan 2023

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2023-January
ISSN (Print)	1084-6999

Conference

Conference	36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2023
Country/Territory	Germany
City	Munich
Period	15/01/23 → 19/01/23

Bibliographical note

Funding Information:
This work has been partially supported by Engineering and Physical Science Research Council (EPSRC) grant (EP/V055011/1), University of Bath Alumni Fund, and Europractice MEMS Design Award.

Publisher Copyright:
© 2023 IEEE.

Funding

This work has been partially supported by Engineering and Physical Science Research Council (EPSRC) grant (EP/V055011/1), University of Bath Alumni Fund, and Europractice MEMS Design Award.

Keywords

Micro-electromechancial Systems (MEMS)
Orthoplanar Spring
Piezoelectric Energy Harvester

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS49605.2023.10052512

QOPS_PzEH_MEMS23

Cite this

Mohammadi, A., Sadrafshari, S., Shokrani, A., & Bowen, C. (2023). Asymmetric Quad-Leg Orthoplanar Spring For Wideband Piezoelectric Micro-Energy Harvesting. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 697-700). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January). IEEE. Advance online publication. https://doi.org/10.1109/MEMS49605.2023.10052512

Asymmetric Quad-Leg Orthoplanar Spring For Wideband Piezoelectric Micro-Energy Harvesting. / Mohammadi, Ali ; Sadrafshari, Shamin ; Shokrani, Alborz et al.
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2023. p. 697-700 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2023-January).

Research output: Chapter or section in a book/report/conference proceeding › Chapter in a published conference proceeding

Mohammadi, A , Sadrafshari, S , Shokrani, A & Bowen, C 2023, Asymmetric Quad-Leg Orthoplanar Spring For Wideband Piezoelectric Micro-Energy Harvesting. in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2023-January, IEEE, pp. 697-700, 36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2023, Munich, Germany, 15/01/23. https://doi.org/10.1109/MEMS49605.2023.10052512

Mohammadi A , Sadrafshari S , Shokrani A , Bowen C. Asymmetric Quad-Leg Orthoplanar Spring For Wideband Piezoelectric Micro-Energy Harvesting. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE. 2023. p. 697-700. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Epub 2023 Jan 30. doi: 10.1109/MEMS49605.2023.10052512

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abstract = "Piezoelectric energy harvesters (EH) generate their highest energy levels at the resonant frequencies of the transducer devices. To provide a wide-band EH solution, nonlinear mechanical resonators with multiple resonant modes can be used. We present a new asymmetric quad-leg orthoplanar spring (QOPS) EH microstructure to increase the harvesting bandwidth. The proposed design is implemented in CMOS compatible microfabrication processes. Finite element analysis show that the asymmetric designs increases the bandwidth by maximum 27\% compared with symmetric designs. In order to measure the electrical output, one symmetric and three asymmetric piezoelectric devices implemented on the same microchip are exposed to mechanical vibrations over a wide frequency bandwidth. Experimental results approve the increase in the frequency bandwidth of resonators introduced by asymmetries added to the spring, as compared to the symmetrical configuration. {\textcopyright} 2023 IEEE. ",

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N1 - Funding Information: This work has been partially supported by Engineering and Physical Science Research Council (EPSRC) grant (EP/V055011/1), University of Bath Alumni Fund, and Europractice MEMS Design Award. Publisher Copyright: © 2023 IEEE.

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N2 - Piezoelectric energy harvesters (EH) generate their highest energy levels at the resonant frequencies of the transducer devices. To provide a wide-band EH solution, nonlinear mechanical resonators with multiple resonant modes can be used. We present a new asymmetric quad-leg orthoplanar spring (QOPS) EH microstructure to increase the harvesting bandwidth. The proposed design is implemented in CMOS compatible microfabrication processes. Finite element analysis show that the asymmetric designs increases the bandwidth by maximum 27% compared with symmetric designs. In order to measure the electrical output, one symmetric and three asymmetric piezoelectric devices implemented on the same microchip are exposed to mechanical vibrations over a wide frequency bandwidth. Experimental results approve the increase in the frequency bandwidth of resonators introduced by asymmetries added to the spring, as compared to the symmetrical configuration. © 2023 IEEE.

AB - Piezoelectric energy harvesters (EH) generate their highest energy levels at the resonant frequencies of the transducer devices. To provide a wide-band EH solution, nonlinear mechanical resonators with multiple resonant modes can be used. We present a new asymmetric quad-leg orthoplanar spring (QOPS) EH microstructure to increase the harvesting bandwidth. The proposed design is implemented in CMOS compatible microfabrication processes. Finite element analysis show that the asymmetric designs increases the bandwidth by maximum 27% compared with symmetric designs. In order to measure the electrical output, one symmetric and three asymmetric piezoelectric devices implemented on the same microchip are exposed to mechanical vibrations over a wide frequency bandwidth. Experimental results approve the increase in the frequency bandwidth of resonators introduced by asymmetries added to the spring, as compared to the symmetrical configuration. © 2023 IEEE.

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Asymmetric Quad-Leg Orthoplanar Spring For Wideband Piezoelectric Micro-Energy Harvesting

Abstract

Publication series

Conference

Bibliographical note

Funding

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

SENSYCUT- Sensor Enabled Systems for Precision Cutting

A New Method for Making Programmable Transducers in MEMS (P-MEMS)

Cite this

Asymmetric Quad-Leg Orthoplanar Spring For Wideband Piezoelectric Micro-Energy Harvesting

Abstract

Publication series

Conference

Bibliographical note

Funding

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Projects

SENSYCUT- Sensor Enabled Systems for Precision Cutting

A New Method for Making Programmable Transducers in MEMS (P-MEMS)

Cite this