Piezoelectric energy harvesters (EH) generate their highest energy levels at the resonant frequencies of the transducer devices. To provide a wide-band EH solution, nonlinear mechanical resonators with multiple resonant modes can be used. We present a new asymmetric quad-leg orthoplanar spring (QOPS) EH microstructure to increase the harvesting bandwidth. The proposed design is implemented in CMOS compatible microfabrication processes. Finite element analysis show that the asymmetric designs increases the bandwidth by maximum 27% compared with symmetric designs. In order to measure the electrical output, one symmetric and three asymmetric piezoelectric devices implemented on the same microchip are exposed to mechanical vibrations over a wide frequency bandwidth. Experimental results approve the increase in the frequency bandwidth of resonators introduced by asymmetries added to the spring, as compared to the symmetrical configuration. © 2023 IEEE.

Original languageEnglish
Title of host publication2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Number of pages4
ISBN (Print)9781665493086
Publication statusE-pub ahead of print - 30 Jan 2023
Event36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2023 - Munich, Germany
Duration: 15 Jan 202319 Jan 2023

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999


Conference36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2023

Bibliographical note

Funding Information:
This work has been partially supported by Engineering and Physical Science Research Council (EPSRC) grant (EP/V055011/1), University of Bath Alumni Fund, and Europractice MEMS Design Award.

Publisher Copyright:
© 2023 IEEE.


  • Micro-electromechancial Systems (MEMS)
  • Orthoplanar Spring
  • Piezoelectric Energy Harvester

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering


Dive into the research topics of 'Asymmetric Quad-Leg Orthoplanar Spring For Wideband Piezoelectric Micro-Energy Harvesting'. Together they form a unique fingerprint.

Cite this