Applications of polyimide membranes to MEMS technology

C. Shearwood; M. A. Harradine; T. S. Birch; J. C. Stevens

doi:10.1016/0167-9317(95)00306-1

Applications of polyimide membranes to MEMS technology

C. Shearwood, M. A. Harradine, T. S. Birch, J. C. Stevens

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32 Citations (SciVal)

Abstract

The fabrication of polyimide membranes on GaAs (001) substrates by bulk micro-machining is described. These membranes have diameters in the range of 1 mm to 8 mm and a thickness of 7 μm. The predicted and measured performance of a representative number of membranes is presented; their application is illustrated with reference to a "micro-speaker" for use in a hearing aid.

Original language	English
Pages (from-to)	547-550
Number of pages	4
Journal	Microelectronic Engineering
Volume	30
Issue number	1-4
DOIs	https://doi.org/10.1016/0167-9317(95)00306-1
Publication status	Published - Jan 1996

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/0167-9317(95)00306-1

Cite this

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title = "Applications of polyimide membranes to MEMS technology",

abstract = "The fabrication of polyimide membranes on GaAs (001) substrates by bulk micro-machining is described. These membranes have diameters in the range of 1 mm to 8 mm and a thickness of 7 μm. The predicted and measured performance of a representative number of membranes is presented; their application is illustrated with reference to a {"}micro-speaker{"} for use in a hearing aid.",

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AU - Birch, T. S.

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AB - The fabrication of polyimide membranes on GaAs (001) substrates by bulk micro-machining is described. These membranes have diameters in the range of 1 mm to 8 mm and a thickness of 7 μm. The predicted and measured performance of a representative number of membranes is presented; their application is illustrated with reference to a "micro-speaker" for use in a hearing aid.

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Applications of polyimide membranes to MEMS technology

Abstract

ASJC Scopus subject areas

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